Flow Ratio Controllers
For processes requiring precise and uniform distribution of multiple gases within a chamber, MKS offers a pioneering line of DELTA™ Flow Ratio Controllers (FRCs). These innovative instruments are designed to meticulously control and split a single gas source into various streams, ensuring consistent flow ratios across multiple channels. This capability is crucial in various industries, including semiconductor fabrication, flat panel display production, and solar cell manufacturing.
MKS FRCs leverage advanced control algorithms and robust valve technologies to maintain precise flow ratios even under fluctuating pressure or temperature conditions. They offer a wide range of dynamic control capabilities, allowing for rapid adjustments to flow rates as needed. This ensures optimal process uniformity and repeatability, leading to superior product quality and yield.
DELTA II 2-zone Flow Ratio Controller
- Accurately and repeatably control flow ratio for better process optimization
- Digital control loop provides rapid response to channel set point independent of the gas mix
- Uses standard web browser with no special software required
DELTA III 3-zone Flow Ratio Controller
- Accurately and repeatably control flow ratio for better process optimization
- Digital control loop provides rapid response to channel set point independent of the gas mix
- Uses standard web browser with no special software required
DELTA IV 4-zone Flow Ratio Controller
- Accurately and repeatably control flow ratio for better process optimization
- Digital control loop provides rapid response to channel set point independent of the gas mix
- Uses standard web browser with no special software required