Page view updated with the selected options.
Ozone Gas Generators
SEMOZON® Ozone gas generators and subsystems are the industry standard for compact, high concentration, ultra-clean ozone gas generation. Applications include Atomic Layer Deposition (ALD), Atomic Layer Etch (ALE), Chemical Vapor Deposition (CVD) and Wet Cleaning.
AX8415 Ultra High Concentration, High Flow Ozone Generator
- Ozone concentration up to 425 g/Nm3 or 27.1 wt% at 5°C @ 2.5 slm
- O2 flow rate from 2.5 slm to 50 slm enables process flexibility
- Patented cell design enables production of high concentration ozone
AX8410 PRIME High Concentration, Ultra High Flow Ozone Generator
- Ozone concentration up to 375 g/Nm3 or 24.2 wt% at 5°C
- O2 flow rate from 5 slm to 80 slm enables process flexibility
- Patented cell structure design improves gap uniformity to enable production of high concentration ozone
AX8407 High Flow Ozone Generator
- Ozone concentration up to 335 g/Nm3 or 21.7 wt% at 5°C
- O2 flow rate from 5 slm to 40 slm enables process flexibility
- Patented cell structure design enables production of high concentration ozone
Page 1 of 1