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154B High Flow Control Valve

Overview Features Resources Contact Us

154B High Flow Control Valve

Overview Features Resources Contact Us

The MKS Instruments 154 High Flow Control Valve offers better response time as compared to other high flow control valves. This is possible through the use of a "balanced forces" design that automatically neutralizes the pressure-induced imbalances within the valve. The elastomer-sealed 154 valve is designed for flow rates from 0.2 to 200 slm.

Resources

Technical Notes

  • Vacuum Pressure Control for Semiconductor Fabrication

Literature

  • 154B Solenoid Control Valve(1.6 MB, PDF)

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