154B High Flow Control Valve
Overview
The MKS Instruments 154 High Flow Control Valve offers better response time as compared to other high flow control valves. This is possible through the use of a "balanced forces" design that automatically neutralizes the pressure-induced imbalances within the valve. The elastomer-sealed 154 valve is designed for flow rates from 0.2 to 200 slm.
- 316 S.S., Nickel and Viton® wetted materials (other seal materials optional)
- 20 to 200 slm full scale flow ranges
- ½” Swagelok®, 8 VCR, or 8 VCO® male fittings
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
|
0154B-200LRB Upstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Buna-N | $1,883.00 |
|
||||
|
|
0154B-200LRK Upstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Kalrez | $2,114.00 |
|
||||
|
|
0154B-200LRN Upstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Neoprene | $1,883.00 |
|
||||
|
|
0154B-200LRV Upstream Flow Control Valve, High Flow, 200 slm, 8 VCR, Viton | $1,883.00 |
|
||||
|
|
0154B-200LSB Upstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Buna-N | $1,883.00 |
|
||||
|
|
0154B-200LSK Upstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Kalrez | $1,883.00 |
|
||||
|
|
0154B-200LSN Upstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Neoprene | $1,883.00 |
|
||||
|
|
0154B-200LSV Upstream Flow Control Valve, High Flow, 200 slm, 0.5 in. Tube, Viton | $1,883.00 |
|
Specifications
-
Type154B High Flow Control Valve
-
Full Scale Flow Range20 - 200 slm
-
Minimum Controllable Flow0.1% of Full Scale
-
Closed Conductance Leakage<0.1% of Full Scale (15 psid to atm)
-
Exposed MaterialsStandard: 316 S.S., Nickel, Viton®
Optional: Buna-N, Kalrez®, Neoprene® -
Seal MaterialElastomer
-
Fitting TypeStandard: 1/2 inch Swagelok®
Optional: 8 VCR or 8 VCO® male -
Operating Temperature-10 to 60°C
Resources
Technical Notes
Literature
- 154B Solenoid Control Valve (1.6 MB, PDF)
Ultra-High Velocity