Granville-Phillips® 835 Vacuum Quality Monitor System
Granville-Phillips® 835 Vacuum Quality Monitor System
Please Note
Replacment parts for the 835 Vacuum Quality Monitor are still available from MKS, and can be found on this page: Vacuum Quality Monitor System Components
The Granville-Phillips® Series 835 Vacuum Quality Monitor (VQM™) combines the highest performance gas analysis technology with intelligent functional design that transforms complex measurement into actionable information. The 835 VQM is a low power mass spectrometer with full data collection, spectral deconvolution, and data logging at 85 ms capture rates for the full 1-145 amu measurement range or 125 ms for 1-300 amu.
Resources
Literature
835 Vacuum Quality Monitor System (Archive)(367.1 kB, PDF)
Manuals
830/835 VQM Filament Replacement Instructions(322.3 kB, PDF) 830 to 835 VQM Upgrade Guide(95.8 kB, PDF) 835 VQM® Software Release Notes(289.6 kB, PDF) Quick Start Guide for the 835 Vacuum Quality Monitor™ System(PDF) 835 VQM® User Manual(5.8 MB, PDF) 835 VQM® System >3 meter MS Controller-to-Gauge Interconnect Cable Optimization(129.7 kB, PDF) VQM® Electron Multiplier Replacement Instructions(649 kB, PDF) 835 VQM® Differential Pumping System Manual(1.2 MB, PDF) 835 VQM® Programmers Reference Manual(1.1 MB, PDF)