150/160 Series Soft-start Bellows Vacuum Isolation Valve

Two-stage 150/160 Series Soft-start Bellows Vacuum Isolation Valves achieve a soft pump down and vacuum system isolation in one common housing. A small bypass valve is integrated into the main isolation valve, simplifying setup and reducing costs. With the integrated soft pump down feature, turbulent flow is diminished preventing contamination buildup and damage.

NW25 - NW100
Two-stage with adjustable conductance for variable pump down speed
Designed to ensure product quality, reliability, and value

See All Features

Configuration Options

Please see the Two-stage Soft Start Valve datasheet for available product options.

Description
V2 Vacuum Isolation Valve, 2-Stage, Soft Start, Bellows-sealed

Specifications

Type
Two-stage Soft Start Bellows-sealed Isolation Valves
Vacuum Range
Atmosphere to 1.0 x 10^-9 Torr
Body Configuration
Angle, Inline
Port Size
NW25, NW40, NW50, NW80, NW100
Helium Leak Rate
1.0 x 10^-9 std cc/sec
Cylinder Volume
0.25 in³ (4.1 cm³)
Limit Switch Rating
5A - 250 VAC

Single Pole, Single Throw
5A - 30 VDC
Blow-By Pressure
Main: 30 - 60 psia, depending on configuration
Bypass: 45 psia
Maximum Internal Spring Closing Pressure
Main: 30 - 60 psia, depending on configuration
Bypass: 40 psia
Maximum Bakeout Temperature
150°C
Suggested Nominal Pressure Supply
65 psig
Bypass Orifice
0.225, 0.063, 0.125, 0.187 inches and custom configurations available

Features

Two-stage Valve Design

The Two-Stage Valve is specifically to accommodate space constraints and soft start the system in two steps. In the first stage, the bypass valve allows slow pumping from atmospheric pressure to a userspecified vacuum pressure. In the second stage, the main valve opens, allowing use of full pumping speed. The Two-Stage Valve features a removable small orifice within the bypass valve to vary slow pump speeds. A normally closed, pneumatically actuated valve at both stages, the TwoStage Valve is offered with an optional thumbscrew or micrometer head for the bypass valve. This allows for flow adjustment by limiting the stroke.

Valve Body Design

The body is made of high grade, corrosion resistant, 304 stainless steel using clean, tungsten inert gas (TIG) welding for significantly fewer entrapment areas, resulting in less contaminant build-up. A formed 321 stainless steel bellows, not edge-welded, prevents outgassing, virtual leaks, and particle entrapment between bellows convolutions and extends the valve’s cycle life. The bellows stroke length is optimized to ensure a longer cycle life while maintaining a high conductance. Elastomer seal choices include Viton® and Chemraz®, which has a higher chemical resistance. Vacuum exposed parts are clean and free of lubricants.

Applications

To achieve a soft pumpdown and isolate your vacuum system, MKS recommends its Two-Stage Valve. It integrates a small bypass valve into an isolation valve, significantly simplifying system setup and reducing costs.

The Two-Stage Valve is best suited for high vacuum applications, specifically semiconductor or optical processing for which a cleaner environment is necessary. With the integrated slow pumpdown feature, turbulent flow is diminished preventing contamination buildup and damage to your product.

Accessories

Replacement Solenoids

Description	Compatibility	Price
100008163Solenoid Valve, Replacement, 24 VDC, 7 Watt	UNIVERSAL	$179
100008165Replacement Solenoid Valve, 120 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	$233
100008166Solenoid Valve, Replacement, 208 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	$153
100008167Solenoid Valve, Replacement, 220-240 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	$189
100008164Solenoid Valve, Replacement, 24 VAC, 50-60 Hz, 6 Watt	UNIVERSAL	$221
100008539Solenoid Valve, Replacement, 12 VDC, 7 Watt	UNIVERSAL	$111

Valve Seals

Description	Compatibility	Price
100004915Viton Seal Set, Two-Stage Vacuum Valves, NW25 Port	UNIVERSAL	$39
100004909Viton Seal Set, Two-Stage Valves, NW80 Port	UNIVERSAL	$57
100004913Viton Seal Set, Two-Stage Vacuum Valves, NW40 Port	UNIVERSAL	$39
100004911Viton Seal Set, Two-Stage Valves, NW50 Port	UNIVERSAL	$49
100004907Viton Seal Set, Two-Stage Vacuum Valves, NW100 Port	UNIVERSAL	$39
100004910Chemraz Seal Set, Two-Stage Vacuum Valves, NW80 Port	UNIVERSAL	$1,489
100004912Chemraz Seal Set, Two-Stage Vacuum Valves, NW50 Port	UNIVERSAL	$1,186
100004916Chemraz Seal Set, Two-Stage Vacuum Valves, NW25 Port	UNIVERSAL	$894
100004914Chemraz Seal Set, Two-Stage Vacuum Valves, NW40 Port	UNIVERSAL	$1,043
100004908Chemraz Seal Set, Two-Stage Vacuum Valves, NW100 Port	UNIVERSAL	$2,399

Limit Switches

Description	Compatibility	Price
100001520Limit Switch Kit, 150, 160, 2-stage, Pneumatic Valves, NW25 or NW40	UNIVERSAL	$97
100001683Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW50 or NW63	UNIVERSAL	$132
100001684Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW80	UNIVERSAL	$132
100003663Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW100	UNIVERSAL	$147

Internal Rebuild Kits

Description	Compatibility	Price
100004918Main Valve Rebuild Kit, Viton Seals, 2-stage Valve, NW25 Port	UNIVERSAL	$987
100007131Main Valve Rebuild Kit with Viton Seal Set, 2-stage Valves, NW40	UNIVERSAL	$431
100007132Main Valve Rebuild Kit with Viton Seal Set, 2-stage Valves, NW50	UNIVERSAL	$613
100007133Main Valve Rebuild Kit with Viton Seal Set, 2-stage Valves, NW80	UNIVERSAL	$935
100004917Main Valve Rebuild Kit, Viton Seals, 2-stage Valve, NW100 Port	UNIVERSAL	$1,379
100004919Bypass Valve Spare Parts, Normally Closed, Viton Seals, Conversion Kit	UNIVERSAL	$375
100004937Bypass Valve Rebuild Kit, Cv, IDA & Lopro 2-Stage Valves	UNIVERSAL	$300
100004939Bypass Valve Rebuild Kit, Viton Seals, 2-stage, CV, IDA, LoPro 2-stage valves with Micrometer	UNIVERSAL	$375
100004938Bypass Valve Rebuild Kit, Viton Seals, 2-stage and LoPro Two-stage valves with Thumbscrew	UNIVERSAL	$357
100004921Bypass Valve Spare Parts, Micrometer, Viton Seals, Conversion Kit	UNIVERSAL	$838
100004920Bypass Valve Spare Parts, Thumb Screw, Viton Seals, Conversion Kit	UNIVERSAL	$448

150/160 Series Soft-start Bellows Vacuum Isolation Valve

150/160 Series Soft-start Bellows Vacuum Isolation Valve

Configuration Options

Specifications

Features

Two-stage Valve Design

Valve Body Design

Applications

Accessories

Replacement Solenoids

Valve Seals

Limit Switches

Internal Rebuild Kits

Resources

Manuals

Literature

Related Products

LoPro™ Soft-start Bellows Vacuum Isolation Valves

ILP Integrated Soft-start Vacuum Isolation Valves