150/160 Series Bellows Vacuum Isolation Valves

150/160 Series single-stage vacuum isolation valves are designed with a formed stainless-steel bellows to prevent outgassing, virtual leaks, and particle entrapment between bellows convolutions and extends the valves cycle life over a conventional O-ring shaft sealed valve.

NW16 - NW160
Designed to ensure product quality, reliability, and value
Dual acting pneumatic operation available in select sizes

See All Features

Description	Compatibility	Body Configuration	Type	Actuation	Port Size	Flange Type	Price
152-0016KVacuum Valve, Pneumatic, Angle, ISO NW16 Flanges	UNIVERSAL	Angle	Vacuum Isolation Valve	Pneumatic	0.75 in.	ISO-KF	$488
152-0025KVacuum Valve, Pneumatic, Angle, ISO NW25 Flanges	UNIVERSAL	Angle	Vacuum Isolation Valve	Pneumatic	1.0 in.	ISO-KF	$543
152-0040KVacuum Valve, Angle, Pneumatic, ISO NW40 Flanges	UNIVERSAL	Angle	Vacuum Isolation Valve	Pneumatic	1.5 in.	ISO-KF	$579
161-0025KVacuum Valve, Inline, Manual, ISO NW25 Flanges	UNIVERSAL	Inline	Vacuum Isolation Valve	Manual	1.0 in.	ISO-KF	$522
162-0016KVacuum Valve, Pneumatic, Inline, ISO NW16 Flanges	UNIVERSAL	Inline	Vacuum Isolation Valve	Pneumatic	0.75 in.	ISO-KF	$579
162-1040KVacuum Valve, Inline, Pneumatic, ISO NW40 Flanges, Limit Switch	UNIVERSAL	Inline	Vacuum Isolation Valve	Pneumatic	1.5 in.	ISO-KF	$725

Configuration Options

Please see the 150/160 and V-100 Valve datasheet for available product options.

	Description
	150-160-VALVE Vacuum Isolation Valve, Single-Stage, Bellows-Sealed

Specifications

Type
Standard Vacuum Isolation Valves
Vacuum Range
15 psig to 1.0 x 10^-9 Torr
Body Configuration
Angle or Inline
Helium Leak Rate
1.0 x 10^-9 std cc/sec
Actuation
Manual or Pneumatic
Body, Nosepiece and Bellows Termination Material
Type 304 stainless steel
Bellows Material
Type 321 stainless steel

Nose Seal
Viton®
Bonnet Seal
Viton®
Limit Switch Rating
5A - 250 VAC
Single Pole, Single Throw
5A - 30 VDC
Maximum Bakeout Temperature
Body: 150°C
Cylinder: 70°C
Piston Material
Anodized aluminum alloys, Buna and plated steel

Features

Formed Bellows

Since bellows are a critical factor in valve reliability, MKS incorporates formed bellows into the 150/160 valves. The first major advantage of using formed bellows is consistency. Since formed bellows do not have welds joining each membrane, there is no stress concentration and fatigue failure from non-uniform welds. The second advantage is that the bellows convolutions never touch completely in the compressed position. Many vacuum processes, like chemical vapor or thin film deposition contain particulate contamination. If small particles fall between formed bellows, they have no effect. If similar particles fall between welded, nested bellows, they deform the membranes, cause stress concentration, and lead to early bellows failure.

Install In Any Position

MKS vacuum valves may be installed in any position, with either the bellows or the nosepiece facing the pump. In systems with condensable materials, it is advantageous to install the valve with the nosepiece toward the chamber. The electropneumatic valve has a solenoid valve attached to the cylinder with a nipple. The cap screws fixing the cylinder to the body may be removed and the cylinder indexed at 90° increments for valves of sizes .75'' to 1.5'', and 60° increments for valves with port sizes 2'' to 6''. If necessary, the solenoid valve can be removed and located remotely.

Applications

Series 150/160 and V-100 valves are designed to insure product quality, reliability and value. They function reliably in applications ranging from semiconductor manufacturing to plasma physics research to nuclear accelerators. MKS manufactures its valves with interchangeable parts, inspecting them at every step.

Accessories

Replacement Solenoids

Description	Compatibility	Price
100008165Replacement Solenoid Valve, 120 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	$233
100008163Solenoid Valve, Replacement, 24 VDC, 7 Watt	UNIVERSAL	$179
100008164Solenoid Valve, Replacement, 24 VAC, 50-60 Hz, 6 Watt	UNIVERSAL	$221
100008539Solenoid Valve, Replacement, 12 VDC, 7 Watt	UNIVERSAL	$111
100008167Solenoid Valve, Replacement, 220-240 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	$189
100008166Solenoid Valve, Replacement, 208 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	$153

Valve Seals

Description	Compatibility	Price
100001699Viton Seal Set, 150, 160 and V-100 Manual Valves, NW16 Port	UNIVERSAL	$30
100001700Viton Seal Set, 150, 160 and V-100 Manual Valves, NW25 Port	UNIVERSAL	$31
100001701Viton Seal Set, 150, 160 and V-100 Manual Valves, NW40 Port	UNIVERSAL	$32
100001702Viton Seal Set, 150, 160 and V-100 Manual Valves, NW50 Port	UNIVERSAL	$35
100001703Viton Seal Set, 150, 160 and V-100 Manual Valves, NW63 Port	UNIVERSAL	$36
100001704Viton Seal Set, 150, 160 and V-100 Manual Valves, NW80 Port	UNIVERSAL	$37
100001691Viton Seal Set, 150, 160 Valves, NW80 Port	UNIVERSAL	$66
100001674Viton Seal Set, Series 150, 160, Vacuum Valves, NW25 Port	UNIVERSAL	$59
100001676Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW50 Port	UNIVERSAL	$53
100001673Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW16 Port	UNIVERSAL	$35
100001677Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW63 Port	UNIVERSAL	$60
100001675Viton Seal Set, 150, 160 Vacuum Valves, NW40 Port	UNIVERSAL	$44
100006113Viton Seal Set, 150, 160 Valves, NW160 Port	UNIVERSAL	$242
100003876Viton Seal Set, Series 150 or 160 Pneumatic Vacuum Valves, NW100 Port	UNIVERSAL	$73

Limit Switches

Description	Compatibility	Price
100001682Limit Switch Kit, 150, 160, V-100 Pneumatic Valves, NW16	UNIVERSAL	$158
100001520Limit Switch Kit, 150, 160, 2-stage, Pneumatic Valves, NW25 or NW40	UNIVERSAL	$97
100001683Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW50 or NW63	UNIVERSAL	$132
100001684Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW80	UNIVERSAL	$132
100003663Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW100	UNIVERSAL	$147
100005802Limit Switch Kit, 150, 160, V-100 Pneumatic Valves, NW160	UNIVERSAL	$179

Internal Rebuild Kits

Description	Compatibility	Price
100006122Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW16	UNIVERSAL	$321
100006123Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Pneumatic Valves, NW25	UNIVERSAL	$338
100006124Valve Rebuild Kit, Viton Seal Set, 150, 160 Valves, NW40	UNIVERSAL	$410
100006125Valve Rebuild Kit with Viton Seal Set, 150, 160 Valves, NW50	UNIVERSAL	$557
100006126Valve Rebuild Kit with Viton Seal Set, 150, 160 Valves, NW63	UNIVERSAL	$641
100006128Valve Rebuild Kit with Viton Seal Set, 150 or 160 Pneumatic Valves, NW100	UNIVERSAL	$924
100006127Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW80	UNIVERSAL	$767
100006129Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW160	UNIVERSAL	$1,869
100008414Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW25	UNIVERSAL	$304
100008413Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW16	UNIVERSAL	$282
100008415Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW40	UNIVERSAL	$309
100008416Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW50	UNIVERSAL	$508
100008418Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW80	UNIVERSAL	$591
100008417Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW63	UNIVERSAL	$541

150/160 Series Bellows Vacuum Isolation Valves

150/160 Series Bellows Vacuum Isolation Valves

Configuration Options

Specifications

Features

Formed Bellows

Install In Any Position

Applications

Accessories

Replacement Solenoids

Valve Seals

Limit Switches

Internal Rebuild Kits

Other Accessories

Resources

Literature

Manuals

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