253B Exhaust Throttle Valves
Model: 253B-20-40-2
253B Exhaust Throttle Valves
Model: 253B-20-40-2

Overview
Overview
The 253B-20-40-2 Exhaust Throttle Valve regulates the removal of gas from a processing system. It features a 0.779 inch (20 mm) nominal inside diameter and a size NW40 ISO-KF Flange. Its flapper is positioned to modulate gas flow, thereby controlling process pressure. The 253 has a patented non-linear actuator placed between the flapper shaft and the motor drive shaft in order to generate a linear valve transfer characteristic and provide smooth linear pressure control. The Type 253 is available in standard sizes and flange styles, and is compatible with all MKS throttle valve controllers.
Technical Specs
- Valve Motor Ambient Operating Temperature0 - 70°C max
- Exposed Materials316 stainless steel and seal material
- Flapper O-ringNo
- External Leak Rate1 x 10-8 scc/sec He
- Closed Leakage<10-7 (Torr l/s)
- Flange SizeNW40
- Flange TypeISO-KF
- Nominal Inside Diameter0.779 in. (20 mm)
- Valve SpeedStandard: 7.5 sec., Optional: <2 sec.
- ResolutionStandard: 1/10,000, Fast Motor Option: 1/2800
- DriveMechanical (non belt) drive with integral cosine generator to linearize valve transfer characteristic
- Maximum Valve Body Operating Temperature0 - 90°C
- Differential Pressure Across Valve1 Atmosphere (15 psig)
Technical Specs
- Valve Motor Ambient Operating Temperature0 - 70°C max
- Exposed Materials316 stainless steel and seal material
- Flapper O-ringNo
- External Leak Rate1 x 10-8 scc/sec He
- Closed Leakage<10-7 (Torr l/s)
- Flange SizeNW40
- Flange TypeISO-KF
- Nominal Inside Diameter0.779 in. (20 mm)
- Valve SpeedStandard: 7.5 sec., Optional: <2 sec.
- ResolutionStandard: 1/10,000, Fast Motor Option: 1/2800
- DriveMechanical (non belt) drive with integral cosine generator to linearize valve transfer characteristic
- Maximum Valve Body Operating Temperature0 - 90°C
- Differential Pressure Across Valve1 Atmosphere (15 psig)
Resources & Downloads
Literature
Downstream Pressure Controllers and Valves from MKS (476.3 kB, PDF)
