392 Micro-Ion® Plus Modular Vacuum Pressure Transducers
Overview
The 392 Micro-Ion® Plus is a second generation full range pressure measurement module that combines industry-standard Micro-Ion® ionization gauge technology with a miniature Pirani Conductron heat-loss sensor to provide accurate, continuous pressure measurement from high vacuum to atmosphere.
- Continuous pressure measurement from 10-9 Torr to atmosphere
- Dual ionization gauge filaments that increase equipment uptime
- EtherCAT, RS-485 and DeviceNet have optional setpoint relays for process control
- Automation of ionization gauge activation and deactivation
- Field replaceable gauge assembly for low Cost-of-Ownership
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
|
392502-2-YE-T Vacuum Gauge, Micro-Ion Plus, Display, NW25 ISO-KF, RS485, 2 Relays | $1,883 |
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392502-2-YG-T Vacuum Gauge, Micro-Ion Plus, Display, 2.75 in. CF, RS485, 2 Relays | $1,940 |
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392601-2-YG-T Vacuum Gauge, Micro-Ion Plus, 2.75 in. OD CF, DeviceNet, 2 Relays | $1,824 |
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392602-3-YG-T Vacuum Gauge, Micro-Ion Plus, Display, 2.75 in. CF, DeviceNet, 3 Relays | $2,114 |
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392710-2-YG-T Vacuum Gauge, Micro-Ion Plus, 2.75 in.CF, EtherCAT, 2 Relays | $1,824 |
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392710-2-YE-T Vacuum Gauge, Micro-Ion Plus, NW25 ISO-KF, EtherCAT, 2 Relays | $2,027 |
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Configuration Options
The following options are available for 392 Micro-Ion® Vacuum Pressure Transducers
Ordering Code Example: 392501-2-TE-T
| Configuration Option | Option Code |
|---|---|
Basic Micro-Ion Plus Modules |
|
| RS-485 interface no display | 392501 |
| RS-485 interface with display | 392502 |
| DeviceNet interface no display | 392601 |
| DeviceNet interface with display | 392602 |
| EtherCAT | 392710 |
Set Point Relays |
|
| Two (EtherCAT only available with two set point relays) | 2 |
| Three | 3 |
Ionization Gauge Filaments |
|
| Yttria-coated iridium | Y |
| Tungsten | T |
Vacuum Connections |
|
| NW16-KF | D |
| NW25-KF | E |
| NW40-KF | K |
| 1.33 in. (NW16-CF) ConFlat-type | F |
| 2.75 in. (NW35-CF) ConFlat-type | G |
| 0.5 in. VCR-type Male | H |
Measurement Units |
|
| Torr | T |
| mbar | M |
| Pascal | P |
The following options are available for 392 Micro-Ion® Replacement Sensor
Ordering Code Example: 392100-Y-E
| Configuration Option | Option Code |
|---|---|
Micro-Ion® Replacement Sensor |
|
| sensor | 392100 |
Ionization Gauge Filaments |
|
| Yttria-coated iridium | Y |
| Tungsten | T |
Vacuum Connections |
|
| NW16-KF | D |
| NW25-KF | E |
| NW40-KF | K |
| 1.33 in. (NW16-CF) ConFlat-type | F |
| 2.75 in. (NW35-CF) ConFlat-type | G |
| 0.5 in. VCR-type Male | H |
Specifications
-
Absolute Measurement Range1 x 10-9 Torr to atmosphere
1.33 x 10-9 mbar to atmosphere
1.33 x 10-7 Pascal to atmosphere
(air or N2) -
TypeVacuum Transducer
-
SensorMicro-Ion Ionization Sensor and Pirani Conductron Sensor
-
Operating Temperature10 - 40°C (50 - 104°F)
-
Maximum Bakeout Temperature05°C (221°F) maximum, with electronics removed
-
Storage Temperature-40 to +70°C (-40 to +158°F)
-
Analog OutputLogarithmic, 0.5 to 7.0 VDC, 0.5 V/decade
-
Internal Volume10.8 cc
-
Exposed Materials304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass
-
Electronic Casing and FlangeAluminum Extrusion with Powder-coat
-
ComplianceRoHS, CE
-
FilamentTungsten or yttria-coated iridium
-
X-ray Limit3 x 10-10 Torr
4 x 10-10 mbar
4 x 10-8 Pascal -
Emission CurrentAutoranging
-
DegasElectron bombardment; 3 Watts for 1 minute/filament
Features
Resources
Literature
- Vacuum Measurement Product Guide (711.5 kB, PDF)
- 392 Micro-Ion® Plus ATM Modules (241 kB, PDF)
Other
- 390 & 392 Declaration of Conformity (373.8 kB, PDF)
Manuals
- 390, 392 Vacuum Transducer Pinouts (219.2 kB, PDF)
- 392 Micro-Ion® Plus Gauge Removal and Replacement Procedure (175.9 kB, PDF)
- 390 Micro-Ion® ATM Four-Sensor Combination Vacum Gauge ModuleManual (1.3 MB, PDF)
- 392 Micro-Ion® Plus Two-Sensor Combination Vacuum Gauge Module Manual (1.2 MB, PDF)
- 392 Micro-Ion® Plus Two-Sensor Combination Vacuum Gauge ModuleManual (1 MB, PDF)
- 392 Micro-Ion® Plus EtherCAT Manual (793.3 kB, PDF)
Ultra-High Velocity