DELTA™ II 2-zone Flow Ratio Controller
Overview
The DELTA™ series mass flow ratio controllers divide and control mixed process gas flows to either multiple chambers or zones within a process chamber at proportions specified by the user to optimize process uniformity and repeatability. DELTA™ series flow ratio controllers with their superior performance and compact design, are the latest offering from MKS, the industry leader in flow ratio control.
- Accurately and repeatably control flow ratio for better process optimization
- Digital control loop provides rapid response to channel set point independent of the gas mix
- Uses standard web browser with no special software required
Products
Configuration Options
The following options are available for DELTA II EtherCAT® Flow Ratio Controllers
Ordering Code Example: DLT2B052183R110
|
Configuration Option |
Option Code |
|---|---|
| DELTA II Flow Ratio Controller | DLT2B |
Reserved |
|
| Reserved | 0 |
Channel Flow Ranges (Flow 2/Flow 1) (XX*) |
|
| 500/500 | 52 |
| 1000/1000 | 13 |
| 2000/2000 | 23 |
| 3000/3000 | 33 |
| 5000/5000 | 53 |
| 10000/10000 | 14 |
Ratio (Flow 2:Flow 1) (Y) |
|
| 1:1 | 1 |
Connector (B) |
|
| EtherCAT | 8 |
Control I/O (C) |
|
| EtherCAT (units must select 3) | 3 |
Control Type (A) |
|
| Ratio: Q2/Q1 or Q1/Q2 | R |
Control Channel (Z) |
|
| Q1 Control: Q1/Q2 | 1 |
| Q2 Control: Q2/Q1 | 2 |
Firmware (QQ**) |
|
| Firmware Revision | 10 |
*For other ranges, consult factory.
**Unless otherwise specified, MKS will ship firmware revision current to date.
The following options are available for DELTA II Analog & DeviceNet Flow Ratio Controllers
Ordering Code Example: DLT2B052183R120
|
Configuration Option |
Option Code |
|---|---|
| DELTA II Flow Ratio Controller | DLT2B |
Reserved |
|
| Reserved | 0 |
Channel Flow Ranges (Flow 2/Flow 1)(XX*) |
|
| 500/500 | 52 |
| 1000/1000 | 13 |
| 2000/2000 | 23 |
| 3000/3000 | 33 |
| 5000/5000 | 53 |
| 10000/10000 | 14 |
Ratio (Flow 2:Flow1) (Y) |
|
| 1:01 | 1 |
Connector (B) |
|
| Analog - 9-pin Type D (MKS pinout) | A |
| DeviceNet - 5 pin microconnector | 6 |
Control I/O (C) |
|
| 0-5 VDC (analog devices) | 1 |
| 0-10 VDC (analog devices) | 2 |
| DeviceNet (DeviceNet units must select 3) | 3 |
Control Type (A) |
|
| Ratio: (DeviceNet units must select R) | R |
| Percentage: | P |
Control Channel (Z) |
|
| Q1 Control: Q1/Q2 or Q1/(Q1+Q2) | 1 |
| Q2 Control: Q2/Q1 or Q2/(Q1+Q2) | 2 |
Firmware (QQ**) |
|
| DeviceNet Firmware Revision | 20 |
| Analog Firmware Revision | 11 |
*For other ranges, Consult Factory
**Unless otherwise specified, MKS will ship firmware revision current to date.
***DeviceNet Units must select R
Specifications
-
TypeFlow Ratio Controller
-
Full Scale Flow Range500/500 sccm, 1000/1000 sccm, 2000/2000 sccm, or 10000/10000 sccm
(N2 equivalent) -
Ratio Accuracy±2% set point (for percent set points above 10%)
-
Channel Flow Control Range0, 5-100% Full Scale (EtherCAT)
-
Input Flow Range5-100% of each channel Full Scale rating (N2 equivalent)
-
Ratio Control Range1:1 to 20:1 and 20:1 to 1:1
-
Ratio Repeatability & Reproducibility0.02% of channel Full Scale
-
Resolution0.02% of channel Full Scale
-
Maximum Operating Outlet PressureEtherCAT: 200 Torr at maximum flow rate through all channels
DeviceNet & Analog: 200 Torr -
Maximum Allowable Outlet Pressure DifferentialEtherCAT: 50 Torr with the same percentage flow through all channels (highest to lowest pressure channel)
DeviceNet & Analog: 50 torr (between Q1 and Q2) -
Normal Operating Pressure Differential<150 torr (<450 torr for 10000/10000) (N2)
-
Ratio Settling TimeEtherCAT: <3 seconds (typical dependent on downstream conductance matching)
DeviceNet: <3 seconds -
Input Ratio Range1:1 to 20:1 and 20:1 to 1:1 (EtherCAT)
-
Ratio Repeatability±0.3% of set point
-
Maximum Inlet Pressure150 psig (non-operational) (EtherCAT)
-
Zero Temperature CoefficientEtherCAT: <0.05% Full Scale/°C
DeviceNet & Analog: 0.05% Full Scale/°C -
Span Temperature CoefficientEtherCAT: <0.08% Reading/°C
DeviceNet & Analog: 0.08% Reading/°C -
Proof Pressure1000 psig (DeviceNet)
-
Burst Pressure1500 psig (DeviceNet)
-
Warm-up TimeEtherCAT: 60 Minutes
DeviceNet & Analog: 30 minutes -
Operating Temperature10-40°C
-
Storage Temperature-20-65°C
-
Storage Humidity0-95% relative humidity, non-condensing
-
Temperature Accuracy±2°C
-
Temperature Resolution0.1°C
-
Fitting Type4 VCR male (non-rotatable)
-
Display4 digits for value, 4 characters for unit
-
External Leak Integrity<1x10-10 (scc/sec He)
-
Leak Integrity Through Closed ValveEtherCAT: < 2% of Channel Full Scale at 400 Torr differential to < 1 Torr
DeviceNet & Analog: <2% of Channel FS at 400 torr differential -
Wetted Materials316 stainless steel VAR, 316 stainless steel, Inconel®, KM-45, PTFE
EtherCAT: Hastelloy® -
Surface Finish5 microinch average Ra
-
WeightLess than 5 lbs. (2.3 kg)
-
ConnectorAnalog: 9-pin Type "D" Male
DeviceNet: 5-pin DeviceNet microconnector
EtherCAT: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power) -
Power RequirementsAnalog: +15-24 VDC ±5%
DeviceNet: 11-25 VDC
EtherCAT: 24 VDC ±10% (10 Watts) -
Power Consumption<9 Watts (DeviceNet)
-
CommunicationAnalog, DeviceNet, or EtherCAT
-
ComplianceCE (an overall metal braided, shielded able, properly grounded at both ends, is required during use).
Features
Resources
Literature
- DELTA™ II DeviceNet™ 2 Zone Flow Ratio Controller (2 MB, PDF)
- DELTA™ II EtherCAT® Flow Ratio Controller (259.8 kB, PDF)
- DELTA™ II Analog 2 Zone Flow Ratio Controller (2.9 MB, PDF)
Manuals
- DELTA™ II Flow Ratio Controller Pin-outs (39.7 kB, PDF)
- DELTA™ II 2-zone Flow Ratio Controller Manual (2.1 MB, PDF)
- DELTA II Communication Manual DeviceNet Supplement (475.2 kB, PDF)
- DELTA II Communication Manual EtherCAT Supplement (390.6 kB, PDF)
Ultra-High Velocity