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Description
DLT3B-DeviceNet Flow Ratio Controller, 3-zone, DeviceNet
DELTA III 3-zone Flow Ratio Controller DLT3B-EtherCAT Flow Ratio Controller, 3-zone, EtherCAT

Specifications

  • Type
    Flow Ratio Controller
  • Full Scale Flow Range
    500, 1000, 2000, and 10000 sccm (each channel) (nitrogen equivalent-Q)
  • Percentage Accuracy
    ±2% set point (for flow ≥10% of channel Full Scale)
  • Channel Flow Control Range
    0, 5-100% Full Scale
  • Ratio Control Range
    0, 5-100% Full Scale
  • Percentage Repeatability
    ±0.3% of set point
  • Repeatability
    ±0.3% of set point
  • Resolution
    0.02% of channel Full Scale
  • Maximum Operating Outlet Pressure
    200 Torr at maximum flow rate through all channels
  • Maximum Allowable Outlet Pressure Differential
    50 Torr with the same percentage flow through all channels
  • Normal Operating Pressure Differential
    <150 Torr @ 3K split 33.3%; Except, <450 Torr for 10K/10K
  • Percentage Settling Time
    <3 seconds (typical dependent on downstream conductance matching)
  • Input Ratio Range
    0, 2 to 100% of total flow within flow channel control range
  • Maximum Inlet Pressure
    150 psig (non-operational)
  • Zero Temperature Coefficient
    <0.05% Full Scale/°C (500 ppm)
  • Span Temperature Coefficient
    <0.08% of Reading/°C (800 ppm)
  • Warm-up Time
    60 minutes
  • Operating Temperature
    10-40°C
  • Storage Temperature
    -20-65°C
  • Storage Humidity
    0-95% relative humidity, non-condensing
  • Temperature Display
    0-100°C
  • Temperature Accuracy
    2°C
  • Temperature Resolution
    0.1°C
  • Fitting Type
    4 VCR male, non-rotatable
  • External Leak Integrity
    <1x10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <2% of channel Full Scale at 500 Torr differential to <10 Torr
  • Wetted Materials
    316 Stainless Steel VAR, 316 Stainless Steel nickel, Inconel, KM-45, PTFE, Hastelloy®
  • Surface Finish
    5 microinch average Ra
  • Connector
    EtherCAT: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
    DeviceNet: 5 pin microconnector
  • Set Point Command Signal
    Digital
  • Communication
    DeviceNet or EtherCAT
  • Compliance
    CE (an overall metal braided, shielded able, properly grounded at both ends, is required during use).

Features

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