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Description
DLT4B-DeviceNet Flow Ratio Controller, 4-zone, DeviceNet
DELTA IV 4-zone Flow Ratio Controller DLT4B-EtherCAT Flow Ratio Controller, 4-zone, EtherCAT

Specifications

  • Type
    Flow Ratio Controller
  • Full Scale Flow Range
    500, 1000, 2000, 3000 and 10000 sccm (each channel nitrogen equivalent-Q)
  • Percentage Accuracy
    ±2% set point (for flow ≥10% of channel Full Scale)
  • Channel Flow Control Range
    0, 5-100% Full Scale
  • Input Flow Range
    0, 2-100% of total flow within flow channel control range
  • Percentage Repeatability
    ±0.3% of set point
  • Resolution
    0.02% of channel Full Scale
  • Maximum Operating Outlet Pressure
    200 Torr at maximum flow rate through all channels
  • Maximum Allowable Outlet Pressure Differential
    50 Torr with the same percentage flow through all channels
  • Normal Operating Pressure Differential
    <150 Torr (@ 4K split 25%); Except <450 Torr for 10K/10K
  • Percentage Settling Time
    <3 seconds (typical dependent on downstream conductance matching)
  • Maximum Inlet Pressure
    150 psig (non-operational)
  • Zero Temperature Coefficient
    <0.05% Full Scale/°C (500 ppm)
  • Span Temperature Coefficient
    <0.08% of Reading/°C (800 ppm)
  • Warm-up Time
    60 minutes
  • Operating Temperature
    10-40°C
  • Storage Temperature
    -20-65°C
  • Storage Humidity
    0-95% relative humidity, non-condensing
  • Temperature Accuracy
    +2°C
  • Temperature Resolution
    0.1°C
  • Fitting Type
    4 VCR male, non-rotatable
  • External Leak Integrity
    <1x10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <2% of channel Full Scale at 500 Torr differential to <10 Torr
  • Wetted Materials
    316 S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality); 316 S.S., Inconel®, KM-45, PTFE
    EtherCAT: Hastelloy®
  • Surface Finish
    5 microinch average Ra
  • Connector
    EtherCAT: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
    DeviceNet: 5 pin microconnector
  • Communication
    DeviceNet or EtherCAT
  • Compliance
    CE (an overall metal braided, shielded able, properly grounded at both ends, is required during use).

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