E28H 0.05-100 Torr Heated (100°C) Baratron® Capacitance Manometers with Etch Sensor
Overview
The E28H temperature regulated capacitance manometer features structures in the sensor housing that eliminate process byproducts from depositing on the surface of the diaphragm, minimizing drift. The E28H Baratron® manometer is temperature controlled to 100°C, accurate to 0.25% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability.
- Temperature controlled to 100°C for up to 0.25% of reading accuracy
- 0 to 10 VDC analog output proportional to absolute pressure
- Etch baffle sensor significantly reduces the ability of byproducts to reach the sensor
- Full Scale ranges low as 50 mTorr for precise low pressure measurement
- All Inconel® sensor-corrosion resistant wetted surfaces
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
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Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Horizontal Calibration
$3,213.00
|
E28H.1TBF5B Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Horizontal Calibration | $3,213.00 |
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Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Horizontal Calibration
$3,213.00
|
E28H.1TDF5B Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Horizontal Calibration | $3,213.00 |
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Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration
$3,213.00
|
E28H11TBE1B Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration | $3,213.00 |
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Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 100°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration, Status LED
$3,359.00
|
E28H11TDE2B Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 100°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration, Status LED | $3,359.00 |
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Heated Capacitance Manometer w/Etch Sensor, 0.05 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Horizontal Calibration, Status LED
$3,503.00
|
E28HU5TBF6B Heated Capacitance Manometer w/Etch Sensor, 0.05 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Horizontal Calibration, Status LED | $3,503.00 |
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Configuration Options
The following options are available for E28H Baratron® Heated Absolute Capacitance Manometers
Ordering Code Example: E28H01TBE1B
| Configuration Option | Option Code |
|---|---|
| E28H Absolute Capacitance Manometer. | E28H |
Full Scale Range |
|
| 0.05 Torr | U5T |
| 0.1 Torr | .1T |
| 0.25 Torr | RET |
| 1 Torr | 01T |
| 2 Torr | 02T |
| 10 Torr | 11T |
| 20 Torr | 21T |
| 100 Torr | 12T |
Fittings |
|
| 0.5 in. OD Tube | A |
| 8 VCR female | B |
| 1.33 in. OD CF | C |
| NW16 ISO-KF | D |
| 8 VCO female | E |
| 2.75 in. OD CF | L |
| NW25 ISO-KF | Q |
Accuracy |
|
| 0.25% of Reading | E |
| 0.50% of Reading | F |
Options |
|
| Standard Configuration, vertical calibration | 1 |
| Temperature/Heater Status, vertical calibration | 2 |
| Standard Configuration, horizontal calibration (ranges <1 Torr only) | 5 |
| Temperature/Heater Status, horizontal calibration (ranges <1 Torr only) | 6 |
Connector |
|
| 15 pin Type "D" with Thread Locks | B |
| 15 pin Type "D" with Slide Locks | P |
Specifications
-
TypeVacuum/pressure Transducer
-
Measurement TypeAbsolute
-
Sensor TemperatureControlled to 100°C
-
Full Scale Pressure Ranges0.05, 0.1, 0.25, 1, 2, 10, 20, and 100 Torr
-
Accuracy0.25% of Reading
0.5% for <1 Torr and 0.05 Torr -
Analog Output0-10 VDC into >10K Ω load
-
Zero Temperature Coefficient0.002% of Full Scale/°C for 1-100 Torr ranges
0.01% Full Scale/°C for 0.1 Torr
0.02% Full Scale/°C for 0.05 Torr -
Span Temperature Coefficient0.02% of Reading/°C
-
Operating Temperature Range15-50°C
-
Volume6.3 cc
-
Warm-up Time2 hours for 1 Torr and higher
4 hours for <1 Torr -
Overpressure Limit45 psia (310 kPa) or 120% Full Scale, whichever is greater
-
Exposed MaterialsInconel®
-
Power Requirements±15 VDC ±5% @ 0.6 Amps (maximum)
-
ComplianceCE
Features
Resources
Literature
- E28H Heated (100°C) Baratron® Capacitance Manometer with Etch Sensor (1.5 MB, PDF)
- Analog 600 Series Absolute Baratron® Capacitance Manometer Selection Guide (2.9 MB, PDF)
Application Notes
- Minimizing Fluorine-Induced Drift in Capacitance Manometers (307.1 kB, PDF)
Manuals
- MKS E28H Manometer Manual (602 kB, PDF)
- 626, 627, 628, E27 & E28 Capacitance Manometer Pin-outs (22.4 kB, PDF)
Ultra-High Velocity