E29H 0.02-1000 Torr Heated (45 or 100°C) Baratron® Capacitance Manometers with Etch Sensor
Overview
The E29H Baratron® Etch Manometer features structures in the sensor housing that eliminate process byproducts from depositing on the surface of the diaphragm, minimizing drift. The E29H Etch Manometer is temperature controlled to either 45°C or 100°C, and includes efficient temperature control electronics to provide superior long-term stability and repeatability.
- Temperature controlled to 45°C or 100°C for up to 0.12% of reading accuracy
- 0 to 10 VDC analog output proportional to absolute pressure
- Full Scale ranges low as 20 mTorr for precise low pressure measurement
- Measures total pressure directly, independent of gas composition
- Integrated sump for particle protection
- Inconel® wetted surfaces are corrosion-resistant
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
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Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Vertical Calibration
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E29H.1TBFL1B Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Vertical Calibration |
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Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Vertical Calibration, Status LED
$3,358.00
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E29H.1TDFL6B Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Vertical Calibration, Status LED | $3,358.00 |
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Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration
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E29H11TBEL1B Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration |
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Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration, Status LED
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E29H11TDCJ2B Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration, Status LED |
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Heated Capacitance Manometer w/Etch Sensor, 0.02 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Horizontal Calibration, Status LED
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E29HU2TDEJ6B Heated Capacitance Manometer w/Etch Sensor, 0.02 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Horizontal Calibration, Status LED |
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Heated Capacitance Manometer w/Etch Sensor, 0.05 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Vertical Calibration
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E29HU5TBFL1B Heated Capacitance Manometer w/Etch Sensor, 0.05 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Vertical Calibration |
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Configuration Options
The following options are available for E29H Baratron® Heated Absolute Capacitance Manometers
Ordering Code Example: E29H01TBEJ2B
| Configuration Option | Option Code |
|---|---|
| E29H Absolute Capacitance Manometer. | E29H |
Full Scale Range |
|
| 0.02 Torr (not available with 100°C) | U2T |
| 0.05 Torr | U5T |
| 0.1 Torr | .1T |
| 0.25 Torr | RET |
| 1 Torr | 01T |
| 2 Torr | 02T |
| 10 Torr | 11T |
| 20 Torr | 21T |
| 100 Torr | 12T |
Fittings |
|
| 0.5 in. OD Tube | A |
| 8 VCR female | B |
| 1.33 in. OD CF | C |
| NW16 ISO-KF | D |
| 8 VCO female | E |
| 2.75 in. OD CF | L |
| NW25 ISO-KF | Q |
Accuracy |
|
| 0.12% of Reading (not available with 100°C) | C |
| 0.15% of Reading (not available with 100°C) | D |
| 0.25% of Reading | E |
| 0.50% of Reading | F |
Temperature |
|
| 45°C | J |
| 100°C | L |
Options |
|
| Standard Configuration, vertical calibration | 1 |
| Temperature/Heater Status, vertical calibration | 2 |
| External Zero/Vertical Calibration | 3 |
| Heater Status/External Zero/Vertical Calibration | 4 |
| Standard Configuration/Horizontal Calibration | 5 |
| Optional Heater Status Indication/Horizontal Calibration | 6 |
| External Zero/Horizontal Calibration | 7 |
| Heater Status/External Zero/Horizontal Calibration | 8 |
Connector |
|
| 15 pin Type "D" with Thread Locks | B |
| 15 pin Type "D" with Slide Locks | P |
Specifications
-
TypeVacuum/pressure Transducer
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Measurement TypeAbsolute
-
Sensor TemperatureControlled to 45°C or 100°C
-
Full Scale Pressure Ranges0.02 (45°C only), 0.05, 0.1, 0.25, 1, 2, 10, 20, 100, 1000, 2000, 5000, 10000, 15000, 20000, 25000 Torr
-
Analog Output0-10 VDC into >10K Ω load
-
Analog Connector9-pin D-sub
-
Span Temperature Coefficient0.02% of Reading/°C
-
Operating Temperature Range45°C version: 15-40°C
100°C version: 15-50°C -
Volume6.3 cc
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Warm-up Time2 hours for 1-25,000 Torr ranges
4 hours for ranges < 1 Torr -
Overpressure Limit45 psia (310 kPa) or 120% Full Scale, whichever is greater
-
Exposed MaterialsInconel®
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Power Requirements±15 VDC±5% @ 0.25 Amps (0.6 Amps for 100°C version)
-
ComplianceCE
Features
Resources
Literature
- E29H Heated (45°C or 100°C) Baratron® Capacitance Manometer with Etch Sensor (1.5 MB, PDF)
- Analog 600 Series Absolute Baratron® Capacitance Manometer Selection Guide (2.9 MB, PDF)
Manuals
- MKS E29H Transducer Manual (659.4 kB, PDF)
- 629 and E29 Capacitance Manometer Pin-outs (21.8 kB, PDF)
Ultra-High Velocity