GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Meters
Overview
The GM50A and GM51A are general purpose, metal sealed Mass Flow Meters (MFM) well suited for a wide variety of applications requiring flow metering from 5 sccm to 50 slm Full Scale, N2 equivalent. These Meters incorporates the latest in digital flow meter electronics along with a well proven, patented thermal sensor and mechanical design.
The GM50A is 1.45 inches wide.
The GM51A is 1.25 inches wide.
- Embedded user interface to easily change range and gas reduces inventory required
- Monitor and collect device data in-situ
- 16 micro-inch 316L surface finish for high purity applications
- Wide choice of digital or analog I/O
Products
Configuration Options
The following options are available for GM50A & GM51A Mass Flow Meters
Ordering Code Example: GM50A013502R63020
|
Configuration Option |
Option Code |
|---|---|
Model |
|
| GM50A Mass Flow Meter (1.45 in. wide) | GM50A |
| GM51A Mass Flow Meter (1.25 in. wide) | GM51A |
Gas (Per Semi Standard E52-0703) |
|
| Nitrogen (N2) | 013 |
| Ammonia (NH3) | 029 |
| Sulfur Hexafluoride (SF6) | 110 |
| Additional Gas Options | See Here |
Flow Range Full Scale* |
|
| 5 sccm | 500 |
| 10 sccm | 101 |
| 20 sccm | 201 |
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
| 20000 sccm | 204 |
| 30000 sccm | 304 |
| 50000 sccm | 504 |
Fittings (compatible with) |
|
| 6 mm Swagelok | M |
| 8 mm Swagelok | E |
| 10 mm Swagelok | P |
| 12 mm Swagelok | F |
| 1/8 in. Swagelok (1000 sccm or below) | A |
| 1/4 in. Swagelok | S |
| 1/2 in. Swagelok | K |
| 3/8 in. Swagelok | J |
| 4 VCR Male | R |
| 8 VCR Male | T |
| C-seal surface mount | C |
| W-seal surface mount | H |
| NW16 ISO-KF | U |
| 2 VCR Male (1000 sccm or below) | B |
Connector |
|
| Profibus (179B Compatible) | 3 |
| Profibus (180 Compatible) | 4 |
| RS485 (uses 9 pin connector) | 5 |
| DeviceNet | 6 |
| EtherCAT | 8 |
| PROFINET | 9 |
| Analog 0 to 5 VDC (9 pin D connector) | A |
| Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds | L |
| Analog 0 to 5 VDC (15 pin D connector) | B |
| Analog 0 to 5 VDC (15 pin D connector), Tied Grounds | M |
| Analog 4 to 20 mA (15 pin D connector) GM50 A only | H |
Valve/Device Type |
|
| No Valve/Mass Flow Meter | 30 |
| Normally Open/Mass Flow Controller, Teflon® | PT |
Firmware |
|
| MKS will ship firmware revision current to date | 20 |
* The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated by a decimal point. The third digit is the exponent of the power of ten. Example flow rate codes:
254 is 2.5 x 104 or 25000 sccm; 153 is 1.5 x 103 or 1500 sccm; 601 is 6.0 x 101 or 60 sccm
Specifications
-
TypeMass Flow Meter (MFM)
-
Full Scale Flow Range5-50000 sccm (N2 equivalent)
-
Measurement Ranges0.1% to 100% of Full Scale (range on mech.)
-
Fitting TypeSwagelok® 4 VCR® male, 0.25 in.
Swagelok compression seal, surface mount,
Swagelok 8 VCR male
0.125 in. Swagelok
0.5 in. Swagelok
6 mm Swagelok
8 mm Swagelok
KF16
0.375 in. Swagelok
12mm Swagelok
2 VCR male -
Flow Input Output SignalVoltage (0 to 5 VDC)
Current (4 to 20 mA) -
Analog Connector15 pin Type D male
9 pin Type D male
15 pin Type D male -
Maximum Inlet Pressure500 psi
-
Proof Pressure1000 psig
-
Burst Pressure1500 psig
-
Typical Accuracy±1% of Reading
-
Repeatability±0.3% of Reading
-
Resolution0.1% of Full Scale
-
Zero Temperature Coefficient<0.05% of Full Scale/°C
-
Span Temperature Coefficient<0.08% of Reading/°C
-
Inlet Pressure Coefficient<0.02% of Reading/psi
-
Warm-up Time30 minutes
(to within 0.2% of Full Scale of steady state performance) -
Operating Temperature10-50°C
-
Storage Humidity0 to 95% relative humidity, non-condensing
-
External Leak Integrity<1 x 10-10 (scc/sec He)
-
Wetted Materials316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)
-
Surface Finish16μ inch average Ra
-
Power Requirements+15 to +24 VDC @ (<2 watts)
-
Weight<2.5 lbs (1.1 kg)
-
ComplianceCE
Features
Resources
Literature
- GM50A Metal Sealed Mass Flow Meter, 5 sccm - 50 slm (2.4 MB, PDF)
- GM51A 1.125 in. Metal Sealed, Digital Mass Flow Meter, 5 sccm - 50 slm (2.5 MB, PDF)
Application Notes
Manuals
- G and I Series Mass Flow Controller/Meter Manual (2.2 MB, PDF)
- G-Series Mass Flow Controller/Meter DeviceNetâ„¢ Supplement (112.5 kB, PDF)
- G-Series Mass Flow Controller/Meter RS485 Supplement (149.3 kB, PDF)
- G and I-Series Mass Flow Controller/Meter Profibus Manual Supplement (86.9 kB, PDF)
- G-Series Mass Flow Controller/Meter PROFINET Communications Supplement (1 MB, PDF)
- G-Series/I-Series MFC Modbus Register Map and Specification (502.9 kB, PDF)
- G-Series MFC Web Browser Tutorial (5.6 MB, PDF)
Ultra-High Velocity