Multi-gas, Multi-range, Elastomer sealed 50 slm Mass Flow Controller with Shut-off Valve
Overview
The G-Series GV50A digitally-controlled mass flow controller is available with either RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics use the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 600 to 800 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
- Flow rates from 5 to 50,000 sccm
- Shut-off valve leak rate of less than 4x10E-09 atm-cc/sec He
- Wide choice of digital (EtherCAT, DeviceNet™, Profibus®, PROFINET and RS485) or analog (0-5 VDC or 4-20 mA) I/O
- Less than 750 millisecond settling time
- Seal and valve plug options of Viton, Buna, Neoprene or Kalrez
Products
Configuration Options
The following options are available for GV50A Mass Flow Controllers with Shut-off Valve
Ordering Code Example: GV50A013502R6V020
|
Configuration Option |
Option Code |
|---|---|
| GV50A Mass Flow Controller | GV50A |
Gas (Per Semi Standard E52-0703) |
|
| Nitrogen (N2) | 013 |
| Ammonia (NH3) | 029 |
| Sulfur Hexafluoride (SF6) | 110 |
| Other Gas Options | See Here |
Flow Range Full Scale |
|
| 5 sccm | 500 |
| 10 sccm | 101 |
| 20 sccm | 201 |
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
| 20000 sccm | 204 |
| 30000 sccm | 304 |
| 50000 sccm | 504 |
Fittings (compatible with) |
|
| 6 mm Swagelok | M |
| 8 mm Swagelok | E |
| 10 mm Swagelok | P |
| 12 mm Swagelok | F |
| 0.125 in. Swagelok (1000 sccm or below) | A |
| 0.25 in. Swagelok | S |
| 0.5 in. Swagelok | K |
| 0.375 in. Swagelok | J |
| 2 VCR Male (1000 sccm or below) | B |
| 4 VCR Male | R |
| 8 VCR Male | T |
| 4 VCO Male | G |
| 8 VCO Male | D |
| NW16 ISO-KF | U |
Connector |
|
| EtherCAT | 8 |
| DeviceNet | 6 |
| RS485 (9 pin connector) | 5 |
| Profibus (1480 Compatible) | 4 |
| Profibus (1179B Compatible) | 3 |
| PROFINET | 9 |
| 9 pin D connector (Analog 0-5 VDC) | A |
| 9 Pin D connector, Tied Grounds (Analog 0-5 VDC) | L |
| 15 pin D connector (Analog 0-5 VDC) | B |
| 15 pin D connector, Tied Grounds (Analog 0-5 VDC) | M |
| 15 pin D connector (Analog 4-20 mA) | H |
Seal Materials |
|
| Viton® | V |
| Buna-N | B |
| Neoprene® | N |
| EPDM | E |
| Kalrez | K |
Valve/Device Type |
|
| Normally Closed | 0 |
Firmware |
|
| MKS will ship firmware revision current to date | 20 |
Specifications
-
TypeMass Flow Controller
-
Full Scale Flow Range5-50,000 sccm
-
Control Range2-100% of Full Scale
-
Fitting TypeCompatible with:
6 mm Swagelok
8 mm Swagelok
10 mm Swagelok
12 mm Swagelok
0.125 in. Swagelok (for 1000 sccm N2 equivalent or below)
0.25 in. Swagelok
0.5 in. Swagelok
0.375 in. Swagelok
Swagelok 4 VCO male
Swagelok 4 VCR male
Swagelok 8 VCR male
Swagelok 8 VCO Male
Swagelok 2 VCR Male (for 1000 sccm N2 equivalent or below)
KF-16 -
Seal MaterialViton®
Buna-N
Neoprene®
EPDM
Kalrez -
ConnectorEtherCAT
DeviceNet
RS485 (9 pin connector)
Profibus (1480 Compatible)
Profibus (1179B Compatible)
PROFINET
9 pin D connector (Analog 0-5 VDC)
9 Pin D connector, Tied Grounds (Analog 0-5 VDC)
15 pin D connector (Analog 0-5 VDC)
15 pin D connector, Tied Grounds (Analog 0-5 VDC)
15 pin D connector (Analog 4-20 mA) -
Maximum Inlet Pressure150 psig
-
Normal Operating Pressure Differential10-5000 sccm; 10-40 psid, 10000-0000 sccm; 15-40 psid, 30000-50000 sccm; 25-40 psid
-
Proof Pressure1000 psig
-
Burst Pressure1500 psig
-
Typical Accuracy± 1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
-
Repeatability± 0.3% of Reading
-
Resolution0.1% of Full Scale
-
Zero Temperature Coefficient< 0.05% of Full Scale/°C
-
Span Temperature Coefficient< 0.08% of Reading/°C
-
Inlet Pressure Coefficient< 0.02% of Reading/psi
-
Typical Settling Time<750 msec, typical above 5% Full Scale
-
Warm-up Time30 minutes
-
Operating Temperature10-50°C
-
Storage Humidity0-95% Relative Humidity, non-condensing
-
Storage Temperature-20° to 80°C
-
External Leak Integrity< 1 x 10-09 (scc/sec He)
-
Leak Integrity Through Closed ValveUp to 10K valve <0.1% of Full Scale at 40 psig to atmosphere, 20K - 50K valve <1.0% of Full Scale at 40 psig to atmosphere
-
Wetted Materials316L S.S. VAR, 316 S.S., Elgiloy®, KM-45
-
Surface Finish16µ inch average Ra
-
Weight3 lbs (1.4 kg)
-
ComplianceCE
Features
Resources
Literature
- GV50A Mass Flow Controller with Integral Shut-off Valve (405 kB, PDF)
Application Notes
- Accelerated Automotive Emission Control Catalyst Research (0, PDF)
- MFCs for Gas Control in Case Hardening Processes (246.3 kB, PDF)
- Gas Delivery for Plasma Spray Coating Applications (320.8 kB, PDF)
- Gas Correction Factors for Thermal-based Mass Flow
- Sample Gas Codes for Mass Flow Controllers/Meters
Manuals
- G and I Series Mass Flow Controller/Meter Manual (2.2 MB, PDF)
- G-Series Mass Flow Controller/Meter DeviceNet™ Supplement (112.5 kB, PDF)
- G and I-Series Mass Flow Controller/Meter Profibus Manual Supplement (86.9 kB, PDF)
- G-Series Mass Flow Controller/Meter RS485 Supplement (149.3 kB, PDF)
- G-Series Mass Flow Controller/Meter PROFINET Communications Supplement (1 MB, PDF)
- G-Series MFC Web Browser Tutorial (5.6 MB, PDF)
Drawings & CADs
- GV50A Mass Flow Controller 3D Model Files
- GV50 Mass Flow Controller Dimensional Drawing (335.8 kB, PDF)
Device Description Files
- GV50A EDS File (346.2 kB, EDS)
- GV50A ESI File (132 kB, XML)
- GV50A Profibus GSD File (1179B compatible) (2.5 kB, GSD)
- GV50A Profibus GSD File (1480 compatible) (2.6 kB, GSD)
Ultra-High Velocity