IP66 Rated Multi-gas, Multi-range Elastomer-sealed 250-500 slm Mass Flow Controllers
Overview
The IE500A mass flow controller is elastomer-sealed, multi-gas/multi-range MFC with an IP66-rated enclosure designed for use in harsh industrial environments where resistance to liquid and dust ingress are essential. The IE500A is capable of Full Scale ranges from 250 slm to 500 slm (N2 equivalent). This broad flow range is enabled by the unique control valve design, which responds rapidly to set point changes while maintaining closed conductance leak rates that are well below other high flow mass flow controllers.
- Flow rates from 250 to 500 slm
- Seal and valve plug option of Viton, Buna, Neoprene or EPDM
- Analog, RS485, Profibus™, or DeviceNet™ I/O
- Standard closed conductance leak rate of less than 1.0% of Full Scale
- 1 to 2 second settling time
Products
Configuration Options
The following options are available for IE500A IP66-rated, Elastomer-sealed 250-500 slm Mass Flow Controllers
Ordering Code Example: IE500A013255T4R0020
|
Configuration Option |
Option Code |
|---|---|
| IE500A Mass Flow Controller | IE500A |
Gas (Per Semi Standard E52-0703) |
|
| Helium (He): 350-700 slm | 001 |
| Argon (Ar): 250-500 slm | 004 |
| Hydrogen(H2): 250-500 slm | 007 |
| Nitrogen (N2): 250-500 slm | 013 |
| Other Gas Options | See Here |
Flow Range Full Scale |
|
| 500 slm (500,000 sccm) | 505 |
Fittings (compatible with) |
|
| 12 mm Swagelok | L |
| 0.5 in. tube compression | S |
| 0.75 in. tube compression | Z |
| 0.5 in. NPT female | M |
| 0.75 in. NPT female | N |
| 8 VCR male | T |
| 8 VCO male | D |
Connector |
|
| Profibus | 4 |
| PROFINET | 9 |
| 15 pin D (Analog 0-5 VDC I/O) | B |
| 15 pin D (4-20 mA I/O) | G |
Seal Materials |
|
| Viton® | V |
| Buna | B |
| Neoprene® | N |
| EPDM | E |
Valve/Device Type |
|
| Standard MFC | 0 |
| Mass Flow Meter | 3 |
Firmware |
|
| MKS will ship firmware revision current to date | 20 |
* For gases not listed in the standard products gas table, please contact the MKS applications department for assistance.
** The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated by a decimal point. The third digit is the exponent of the power of ten. Example flow rate code: 255 is 2.5 x 105 sccm or 250 slm; 105 is 1.0 x 105 sccm or 100 slm
Specifications
-
TypeMass Flow Controller
-
Full Scale Flow Range250-500 slm (N2 equivalent)
-
Fitting TypeCompatible with:
12 mm Swagelok
0.5 in. tube compression
0.75 in. compression
0.5 in. NPT female
0.75 in. NPT female
8 VCR male
8 VCO male -
ConnectorProfibus
PROFINET
15 pin D (Analog 0-5 VDC I/O)
15 pin D (4-20 mA I/O) -
Maximum Inlet Pressure150 psig
-
Normal Operating Pressure Differential40 to 50 psid
-
Burst Pressure1500 psig
-
Control Range2% to 100% of Full Scale
-
Typical Accuracy±1% of set point for >20% to 100% Full Scale
±0.25% of Full Scale for 5% to 20% Full Scale -
Repeatability±0.5% of Reading
-
Resolution0.1% of Reading
-
Zero Temperature Coefficient<0.05% of Full Scale/°C
-
Span Temperature Coefficient<0.08% of Reading./°C
-
Inlet Pressure Coefficient<0.08% of Reading/psi
-
Typical Settling Time<3 sec typical above 10% Full Scale @ 50 psi
-
Warm-up Time1 hour
-
Operating Temperature10° to 50°C
-
Storage Humidity0 to 95% Relative Humidity, non-condensing
-
Storage Temperature-20° to 65°C
-
External Leak Integrity<1 x 10
-
Leak Integrity Through Closed Valve<1.0% Full Scale at 40 psia to vac (<500 mTorr)
-
Seal MaterialViton®
Buna
Neoprene®
EPDM -
Wetted Materials316 S.S., Elgiloy, 430FR, PTFE (Standard)
-
Surface Finish16 µinch average Ra
-
Enclosure RatingIP66
-
Power Requirements15-24 VDC @ (<8 watts)
-
Flow Input Output SignalVoltage: 0-5 VDC
Current: 4-20 mA -
Analog I/O ConnectorVoltage: 15-pin Type "D" male
Current: 15-pin Type "D" male -
Weight12.7 lbs. (5.8 kg)
-
ComplianceCE
Features
Resources
Literature
Application Notes
Manuals
- G and I Series Mass Flow Controller/Meter Manual (2.2 MB, PDF)
- G and I-Series Mass Flow Controller/Meter Profibus Manual Supplement (86.9 kB, PDF)
- G-Series/I-Series MFC Modbus Register Map and Specification (502.9 kB, PDF)
- G-Series MFC Web Browser Tutorial (5.6 MB, PDF)
Ultra-High Velocity