Vapor Sublimation Process Traps

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Overview

Vapor sublimation traps are widely used in silicon nitride LPCVD and Titanium nitride LPCVD processes where significant amount of NH₄Cl byproducts have been observed in the foreline. The Vapor Sublimation Trap draws in effluent vapors and solidifies them before they have a chance to backstream to the reaction chamber, contaminating and hazing your wafers. It also prevents gases from entering and damaging your vacuum pump.

Improved wafer yields
Increased uptime
Protects vacuum pump
Low cost of ownership
Ease of maintenance

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Products

Configuration Options

Vapor Sublimation Process Traps are available with the following options.

Configuration Option	Option Code
Vapor Sublimation Process Trap	WCTRAP
Port Size
NW50	050
NW80	080
NW100	100
Configuration
Angle (NW50 & NW100)	A
Heatable Angle (NW80 only)	H
Inline (NW80 & NW100)	N
Flange
ISO-KF (NW50 only)	K
ISO-MF (NW80 and NW100 only)	M
Body Size
6 inch	6
8 inch	8
Seal Type
Viton®	V
Silicone	S
Water Fittings
Straight	QRS
Elbow	QRL
3/8 in. Tube	None

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	Description
	LPCVDTrap Vapor Sublimation Process Trap, Silicon Nitride and Titanium Nitride LPCVD

Specifications

Capacity

6 inch: 3.0 lbs (1.4 kg) NH₄C
8 inch:10.0 lbs (4.5 kg) NH₄CI
Flow Conductance

p = pressure in mTorr
6 inch: C (I/sec) = 20.74p
8 inch:C (I/sec) = 45.63p
Pressure Drop

Q = gas flow rate in sccm
p = pressure in mTorr
6 inch: Dp (mTorr) = 812 Q/p²
8 inch: Dp (mTorr) = 369 Q/p²
Dry Weight

6 inch: 16.5 lbs (7.5 kg)
8 inch: 28.0 lbs (12.7 kg)

Cooling Water Temperature

< 86° F (30° C)
Cooling Water Flow Rate

> 6 gal/hr (400 ml/min)
Efficiency

> 99%

Features

Accessories

Description	Compatibility	Avail.	Price
100003597 Bonnet Flange Seals, Viton, for 6 in. Vapor Sub Trap	UNIVERSAL	Show	$31.00
100004790 Bonnet Flange Seals, Silicone, for 6 in. Vapor Sub Trap	UNIVERSAL	Show	$40.00
100004954 Replacement Internals, for 6 in. Vapor Sub Trap	UNIVERSAL	Show	$1,911.00
43PWRCORD04 Power Cord, 6 ft., Ground Fault Circuit, Vapor Sublimation Trap Heaters	UNIVERSAL	Show	$179.00
100004980 Water Fittings, Straight, Self-Sealing, Quick Release	UNIVERSAL	Show	$287.00
100009608 Replacement Internals, for 8 in. Vapor Sub Trap	UNIVERSAL	Show	$4,083.00
100004981 Water Fittings, 90 Elbow, Self-Sealing, Quick Release	UNIVERSAL	Show	$331.00
100762020 Viton O-Ring, NW200 Size ISO-MF Vacuum Flange, 2-371 O-Ring Size	UNIVERSAL	Show	$39.00
100009637 Bonnet Flange Seals, Silicone, for 8 in. Vapor Sub Trap	UNIVERSAL	Show	$37.00
9635-1091 Heater, Vapor Sublimation Trap, Inline, 8 in. body, NW80 Port, 120 VAC	UNIVERSAL	Show
9640-0273 Heater, Vapor Sublimation Trap, Angle, 6 or 8 in., NW80, Temperature Alert	UNIVERSAL	Show	$824.00
9635-1094 Heater, Vapor Sublimation Trap, Inline, 6 in., NW80, Low Temperature Alert	UNIVERSAL	Show	$991.00
9635-1093 Heater, Vapor Sublimation Trap, Inline, 6 in. body, NW80 Port, 120 VAC	UNIVERSAL	Show	$911.00
9640-0291 Heater, Vapor Sublimation Trap, Angle Body, 6 or 8 in., NW80 Port	UNIVERSAL	Show	$719.00
9635-1092 Heater, Vapor Sublimation Trap, Inline, 8 in., NW80, Low Temperature Alert	UNIVERSAL	Show	$968.00
9640-1093 Heater, Vapor Sublimation Trap, Inline, 6 in. body, NW100 Port, 120 VAC	UNIVERSAL	Show	$934.00
9640-1091 Heater, Vapor Sublimation Trap, Inline, 8 in. body, NW100 Port, 120 VAC	UNIVERSAL	Show	$980.00
9640-1092 Heater, Vapor Sublimation Trap, Inline, 8 in., NW100, Low Temperature Alert	UNIVERSAL	Show	$1,003.00
9640-1094 Heater, Vapor Sublimation Trap, Inline, 6 in., NW100, Low Temperature Alert	UNIVERSAL	Show	$1,020.00