High Performance Multi-gas, Multi-range 5 to 50,000 sccm Mass Flow Controllers
High Performance Multi-gas, Multi-range 5 to 50,000 sccm Mass Flow Controllers
The P4B is the next generation of multi-gas/multi-range mass flow controllers designed to meet critical gas flow control requirements for accuracy and speed of response while minimizing mass flow controller inventory requirements. P4B MFC multi-gas/multi-range capabilities are enabled with gas parameters already stored in memory which provide 1% of set point accuracy for the user selected gas and is capable of Full Scale ranges from 5 sccm to 50 slm.
- Flow rates from 5 to 50,000 sccm
- Multi-gas/multi-range with 1% of set point accuracy
- Analog I/O: 0 to 5 VDC
- MFM option See All Features
Configuration Options
The following options are available for P4B Metal-sealed, Digital Mass Flow Controllers
Ordering Code Example: P4B013502C6T030
|
Configuration Option |
Option Code |
|---|---|
| P4B Mass Flow Controller | P4B |
Gas (Per Semi Standard E52-0703) |
|
| Nitrogen (N2) | 013 |
| Ammonia (NH3) | 029 |
| Sulfur Hexafluoride (SF6) | 110 |
| Other Gas Options | See Here |
Flow Range Full Scale |
|
| 5 sccm | 500 |
| 10 sccm | 101 |
| 20 sccm | 201 |
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
| 20000 sccm | 204 |
| 30000 sccm | 304 |
| 50000 sccm | 504 |
Fittings (compatible with) |
|
| 4 VCR Male | R |
| C-seal (1.125 in.) | C |
| W-seal (1.125 in.) | H |
Connector |
|
| DeviceNet | 6 |
| 9 pin D connector | A |
| 15 pin D connector | B |
Valve Type |
|
| Normally Closed, Teflon® (10 sccm - 50 slm) | T |
| Normally Open, Teflon® (10 sccm - 50 slm) | P |
| Mass Flow Meter | 0 |
Reserved |
|
| Standard | 0 |
Firmware |
|
| Shipped with up to date firmware revision | 30 |
Specifications
- Full Scale Flow Range5 - 50,000 sccm (N2 equivalent)
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential5 to 5000 sccm (10 to 40 psid)
10000 to 20000 sccm (15 to 40 psid)
30000 to 50000 sccm (25 to 40 psid) - Proof Pressure1000 psig
- Burst Pressure1500 psig
- Control Range2% to 100% of Full Scale
- Typical Accuracy±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale - Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient< 0.05% of Full Scale/°C
- Span Temperature Coefficient< 0.08% of Reading/°C
- Inlet Pressure Coefficient< 0.02% of Reading/psi
- Typical Settling Time< 750 msec., typical above 5% Full Scale
- Warm-up Time30 minutes
- Operating Temperature10° to 50°C
- Storage Humidity0 to 95% Relative Humidity, non-condensing
- Storage Temperature-20° to 80°C
- Temperature Display0 to 100°C
- Temperature Accuracy±2°C
- Temperature Resolution0.1°C
- Display4 digits for value, 4 characters for unit
- External Leak Integrity< 1 x 10
- Leak Integrity Through Closed Valve< 1.0% of Full Scale at 25 psig inlet to atmosphere
- Wetted Materials316L stainless steel VAR,316 stainless steel, Elgiloy, KM-45
- Valve Seat MaterialPTFE (Teflon)
- Surface Finish10µ inch average Ra
- Weight3 lbs (1.4 kg)
- ComplianceCE
- Power Requirements+15 to +24 VDC @ 350mA max
- Analog I/O Connector15-pin Type "D" Male, 9 pin Type "D" Male
- Flow Input Output Signal0 to 5 VDC
Features
Short Process Steps Performance
The performance capabilities of the P4B are quickly apparent where short process steps are required given the sub 750 millisecond control times and accuracy to within 1% of set point. This performance extends over the range of process gases, whether “light” gases such as helium or “heavy” gases like SF6.
Multi-Gas / Multi-Range Capability
Utilization of the multi-gas/multi-range capability is made simple through the device’s embedded software and standard Ethernet interface that requires no special software, only a standard web browser and a PC. Already stored on the device are critical gas parameters for most of the gases in use today by the semiconductor industry. It is a simple matter of selecting the gas and specifying the range to configure the device. Through this interface the user can also perform device monitoring diagnostics while the device is operating.
MKS P Series Mass Flow Controllers
P-Series high performance MFCs feature full digital control architecture for fast response to setpoint over the operable device range. The embedded web browser application allows changes in gas type and full scale flow, which reduces overall costs by minimizing the number and variety of MFCs that must be kept in inventory.
Communications Options
| Digital I/O | DeviceNet™ | RS485 |
|---|---|---|
| Input Power Required | +11 to +25 VDC per DeviceNet specification (@ <2.0 watts) | +15 to +24 VDC @ 200mA max |
| Connector | 5 pin microconnnector (DeviceNet) | 9 pin Type "D" Male |
| Data Rate Switch/Selection | 4 positions: 125, 250, 500K (Default), PGM (programmable over the network) | 3 positions: 9.6, 19.2, 38.4K (Default) |
| Data Rate/Network Length | Data rate (user selectable) 125 Kbps, 500 meters (1,640 feet) 250 Kbps, 250 meters (820 feet) 500 Kbps, 100 meters (328 feet) |
Data rate (user selectable) 9.6 Kbps, 1200 meters (4,000 feet) 19.2 Kbps, 1200 meters (4,000 feet) 38.4 Kbps, 1200 meters (4,000 feet) |
| MAC ID Switches/Addresses | 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers 7,0 to 9,9 are software ID numbers (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6.3) |
2 switches, 10 positions; 0,0 to 9,9. Available MAC ID's are 3,2 to 9,9. |
| Network Size | Up to 64 nodes | Up to 32 nodes |
| Network Topology | Linear (trunkline/dropline) power and signal on same network cable | Master/slave |
| Visual Indicators | LED network status (green/red) LED module status (green/red) Scrolling LED displays (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31) |
LED network status (green/red) LED module status (green/red) Scrolling LED displays (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31) |
| Compliance | CE | CE |
