Technical Articles
Baratron® Capacitance Manometer for Corrosive Environments
Baratron® capacitance manometers are a critical enabling invention for the etch process due to its ability to accurately measure process pressure without significant degradation.
Technical Articles
Chamber Pumpdown Studies
Residual gas analyzers are valuable tools for vacuum system maintenance and pumpdown studies. Many users limit their RGA uses to just leak detection after a problem has been discovered because the chamber does not meet base pressure specifications.
Technical Articles
Dynamic Frequency Tuning (DFT)
Dynamic Frequency Tuning (DFT) for RF plasma generators is a patented new software algorithm that is a significant advance over the guided-search auto frequency tuning (AFT) algorithms currently in use.
Technical Articles
Epitaxial Process Monitoring and Development
Residual Gas Analyzers (RGA) have proven to be a useful tool and hold promise to help optimize epitaxial processes against costly yield losses and extensive tool downtime.