Dissolved Ammonia Delivery System
Overview
The DI-Solver™ NH3 is a compact, stand-alone system designed to provide dissolved ammonia water for use in rinsing processes in the semiconductor industry. With Semiconductor 3D IC architectures using new materials like Cu-Co and Si-SiGe, the ability to wet clean with precise alkaline chemistries is growing in frequency and importance. The system is specifically designed to provide optimal cleaning capability at a given conductivity. The alkaline chemistry of dissolved ammonia provides ESD protection during rinsing, particle lift-off, and residual particle removal. It also prevents corrosion of metal interfaces, which is a common problem in semiconductor manufacturing. The system uses closed-loop control to keep conductivity and pressure stable under changing flow conditions. It also monitors and adjusts the NH4OH concentration to deliver the desired level of dissolved ammonia.
MKS' Di-Solver NH3 leverages the established and proven architecture of LIQUOZON® VariO3 Ozonated Water Delivery System, integrating high purity standard materials and safety features in a rugged system to meet the demands of advanced technology manufacturing.
- Best dynamic conductivity control and accuracy at point of use from proprietary control of gas
- Increases yields by inhibiting Electro Static Discharge
- Improves interconnect reliability and yield by preventing metal surface and post CMP clean corrosion
Products
Specifications
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Outlet PressureConfigurable 1.0-3.0 barg (3.7barg with outlet pump)
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Plumbing MaterialsLiquid Wetted Surfaces: PFA, PTFE, quartz glass
Gas Wetted Surfaces: 316L stainless steel, PFA, PTFE -
CommunicationBinary in/out, RS232/RS485, analog 4-20 mA in/out, USB
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DimensionsCoated steel, approximately 1810 mm high, 800 mm wide, 610 mm deep (71.2 x 31.5 x 24.1 in.)
Overall height: approx. 2000 mm (79 in.) -
Weight290-300 kg, depending on configuration
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ComplianceCE, SEMI S2, SEMI F47, NRTL
Features
Resources
Drawings & CADs
- DI-NH3 Dimensional Drawing (1 MB, PDF)
Ultra-High Velocity