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High Flow Mass Flow Meters
MKS high flow thermal mass flow meters have flow rates up to 1000 slm in harsh environments where protection from water and dust is required.
IE500A IP66 Rated Multi-gas, Multi-range Elastomer-sealed 250-500 slm Mass Flow Meter
- IP66 rated enclosure provides protection against water & dust in harsh environments
- Tightly controlled flow accuracy of process gas improves process matching
- Multi-gas/multi-range capability reduces MFM inventory
IE1000A IP66 Rated Multi-gas, Multi-range Elastomer-sealed 500-1000 slm Mass Flow Meters
- IP66 rated enclosure provides protection against water & dust in harsh environments
- Tightly controlled flow accuracy of process gas improves process matching
- Multi-gas/multi-range capability reduces MFM inventory
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