622D 1-1000 Torr, Unheated Absolute Baratron® Capacitance Manometers
Overview
The Baratron® 622D unheated absolute capacitance manometer is the latest of MKS' analog, capacitance-based, high-performance vacuum and pressure transducers. It requires ±15VDC input voltage and provides a high-level 0-10 VDC analog output signal that is linear with pressure.
- 0 to 10 VDC proportional analog output with terminal block
- Direct measurement of chamber total pressure independent of gas type
- Long-term output stability for state-of-the-art process repeatability
- Inconel® and Incoloy® nickel alloy construction of basic sensor
- High overpressure limit ensures reliability during system mishaps
- Specified in percent of reading for best accuracy and improved process yield
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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622D01TBE Absolute Pressure Transducer, 1 Torr, 8 VCR-F, 5-pin Terminal Block | $1,448.00 |
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622D01TDE Absolute Pressure Transducer, 1 Torr, NW16 ISO-KF, 5-pin Terminal Block | $1,448.00 |
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622D02TBE Absolute Pressure Transducer, 2 Torr, 8 VCR-F, 5-pin Terminal Block | $1,448.00 |
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622D02TDE Absolute Pressure Transducer, 2 Torr, NW16 ISO-KF, 5-pin Terminal Block | $1,448.00 |
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622D11TBE Absolute Pressure Transducer, 10 Torr, 8 VCR-F, 5-pin Terminal Block | $1,448.00 |
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622D11TDE Absolute Pressure Transducer, 10 Torr, NW16 ISO-KF, 5-pin Terminal Block | $1,448.00 |
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622D12TBE Absolute Pressure Transducer, 100 Torr, 8 VCR-F, 5-pin Terminal Block | $1,448.00 |
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622D12TDE Absolute Pressure Transducer, 100 Torr, NW16 ISO-KF, 5-pin Terminal Block | $1,448.00 |
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622D13TBE Absolute Pressure Transducer, 1000 Torr, 8 VCR-F, 5-pin Terminal Block | $1,448.00 |
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622D13TDE Absolute Pressure Transducer, 1000 Torr, NW16 ISO-KF, 5-pin Terminal Block | $1,448.00 |
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Specifications
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TypeVacuum/pressure Transducer
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Measurement TypeAbsolute
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Full Scale Pressure Ranges1, 2, 10, 20, 100, 500, or 1000 Torr and metric equivalents
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Sensor TemperatureAmbient
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Analog Output0-10 VDC into > 10 kΩ load
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Accuracy0.25% of Reading for 1-1000 Torr
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Electrical Connector5-pin Terminal Block
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Zero Temperature Coefficient0.005% FS/°C for 10-1000 Torr ranges
0.010% FS/°C for 2 Torr range
0.015% FS/°C for 1 Torr range
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Span Temperature Coefficient0.04% of Reading/°C
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Operating Temperature Range0-50°C
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Resolution0.001% of Full Scale
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Volume6.3 cc
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Overpressure Limit45 psia (310 kPa)
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Exposed MaterialsInconel® and Incoloy® nickel alloys
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Power Requirements±15VDC (±5%) @ 35 mA
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ComplianceCE
Features
Resources
Literature
- 622D, 626D Unheated Absolute Baratron® Capacitance Manometer (2.1 MB, PDF)
- Analog 600 Series Absolute Baratron® Capacitance Manometer Selection Guide (2.9 MB, PDF)
Manuals
- MKS 622D, 626D & 623H Transducers Manual (713.3 kB, PDF)
- 622 Capacitance Manometer Pin-outs (21.7 kB, PDF)
Ultra-High Velocity