Sorry, this product is no longer offered for sale. The recommended replacement product is t2b-ethercat-exhaust-throttle-valves.

651C Digital/Analog Pressure Controller

The 651C Self-tuning/Digital PID Valve Controller drives MKS 653 or 253 Exhaust Throttle Valves with speed and precision. Its self-tuning algorithm brings the system to set point faster than conventional controllers, and ensures repeatable process recipes without operator involvement. The self-tuning function determines optimal control parameters for any set point in the range of the valve by learning time constants, transfer functions of the valve and plumbing, valve gain, and other important parameters.

See All Features

Specifications

Type
651C Digital/Analog Pressure Controller
For Use With
653 or 253 Exhaust Throttle Valves
Power Input
90-132 or 180-264 VAC, 50/60 Hz
Power Output
Standard: ±15 VDC ±5 @ 0.5 Amp (Derated to 0.4 Amp with 90-99 or 180-198 VAC input) when powered
Optional: ±15 VDC ±5% @ 1.5 Amps max.
Pressure Control Signal
0-10 VDC, 0-5 VDC, or 0-1 VDC, user selectable
Output Signal
Analog, "0-5 or 0-10 VDC for 0-100% valve position and 0-10 VDC for 0-100% Full Scale pressure.
Set Points
Programmable: 5 total, programmable in any combination for pressure or position (adjustable from the front panel or RS-232; selectable from the front panel, TTL, or RS-232)
External Analog: 1; pressure or position, 0-5 or 0-10 VDC
Relay Output
2, process limits: 24 Volts VDC @ 1 Amp resistive

Repeatability
±0.1% of Full Scale
Operating Temperature
15 - 40°C (60 - 104°F)
Display
2-line LCD with 4-1/2 place readout
(pressure and valve position)
Display Units
Torr, mTorr, mbar, Pascal, cmH₂O, inH₂O, µbar, kPa
User Interface
Front panel, Analog, TTL (16 inputs, 6 outputs) and RS-232
Dimensions
half-rack packaging: 3-1/2 inches H x 9-1/2 inches W x 9 inches D
Controls
Self-tuning Unit, PID Control, Remote Zero, Remote Control Override (Open, Close, hold), Position Control Capability

Accessories

Other Accessories

Description	Compatibility	Price
CB651-30-10Throttle Valve Cable, 651 Controller to 253 Valve, 10 ft.	UNIVERSAL	$126
CB652-1-10Throttle Valve Cable, 651 Controller to 653 Valve, 10 ft.	UNIVERSAL	$231
CB656-1-10Cable, 651 Controller to 656 Throttle Valve, 10 ft.	UNIVERSAL	$217

Resources

Manuals

651C Pressure Controller Manual(684.7 kB, PDF)
651 Pressure Controller Pin-outs(32.1 kB, PDF)