PBMS2H is a portable two-channel pressure standard with a pressure measurement range of 10-5 to 1000 Torr for real-time in situ pressure verification applications.
The MKS PBMS2H is suitable for use in the calibration lab, production floor, or cleanroom environment. The system includes one or two 627H Baratron® capacitance manometers, a PR4000B display and an uninterruptable power supply all housed in a rugged wheeled cart with an extendable handle for easy maneuvering.
The manometers are temperature-controlled at 45°C to maintain stability and high accuracy. The front face of the cart is angled upward to allow for easy viewing of the digital LCD readout.
Features
Key Features:
- Accurately measures diverse pressures
- Ensures long-lasting performance and corrosion resistance
- Ensures confident, accurate pressure readings traceable to national standards
- Facilitates simplified operation with clear display
- Enables seamless integration for efficient data collection and analysis
- Allows for convenient power backup, transport, and setup in various locations
A typical process pressure set point verification set up.
The cart’s pressure standards are removed from its storage drawer and placed near the process tool’s manometer port. This is facilitated by using a combination isolation valve such as the MKS’ IDA™ In Situ Diagnostic Access Isolation Valve. When the pressure standard is connected to the isolation valve’s access port, it can be used to verify the accuracy of the gauge and check the system’s set point pressure.
Resources
Literature
Drawings & CADs
PBMS2H Dimensional Drawing(227 kB, PDF)