elite™ 13.56 MHz RF Plasma Generators

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Overview

The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.

Air cooled for lower facilities cost - does not require connection to factory cooling loop
High efficiency design, DC to RF efficiency of >85% for low power consumption
Compact half rack enclosure enables direct tool mounting
Integrated single board design eliminates cables and connectors

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Products

Compare	Description	Compatibility	rankScore	Frequency	Dynamic Power Range	Interface	Availability
ELITE-300HA-01 RF Plasma Generator, 300 W, 13.56 MHz, 25-pin Analog Interface, Half Rack Show	ELITE-300HA-01 RF Plasma Generator, 300 W, 13.56 MHz, 25-pin Analog Interface, Half Rack	UNIVERSAL	1.0	13.56 MHz ±0.005%	1 - 300 W	25 pin Analog, RS232	Show
ELITE-300HD-01 RF Plasma Generator, 300 W, 13.56 MHz, DeviceNet & Analog, Half Rack Show	ELITE-300HD-01 RF Plasma Generator, 300 W, 13.56 MHz, DeviceNet & Analog, Half Rack	UNIVERSAL	1.0	13.56 MHz ±0.005%	1 - 300 W	DeviceNet, 25 pin Analog, RS232	Show
ELITE-600FD-01 RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Full Rack Show	ELITE-600FD-01 RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Full Rack	UNIVERSAL	1.0	13.56 MHz ±0.005%	1 - 600 W	DeviceNet, 25 pin Analog, RS232	Show
ELITE-600HA-01 RF Plasma Generator, 600 W, 13.56 MHz, 25-pin Analog Interface, Half Rack Show	ELITE-600HA-01 RF Plasma Generator, 600 W, 13.56 MHz, 25-pin Analog Interface, Half Rack	UNIVERSAL	1.0	13.56 MHz ±0.005%	1 - 600 W	25 pin Analog, RS232	Show
ELITE-600HD-01 RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Half Rack Show	ELITE-600HD-01 RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Half Rack	UNIVERSAL	1.0	13.56 MHz ±0.005%	1 - 600 W	DeviceNet, 25 pin Analog, RS232	Show
ELITE-600HP-01 RF Plasma Generator, 600 W, 13.56 MHz, Profibus Interface, Half Rack Show	ELITE-600HP-01 RF Plasma Generator, 600 W, 13.56 MHz, Profibus Interface, Half Rack	UNIVERSAL	1.0	13.56 MHz ±0.005%	1 - 600 W	Profibus, RS232	Show
ELITE-750FD-01 RF Plasma Generator, 750 W, 13.56 MHz, DeviceNet & Analog, Full Rack Show	ELITE-750FD-01 RF Plasma Generator, 750 W, 13.56 MHz, DeviceNet & Analog, Full Rack	UNIVERSAL	1.0	13.56 MHz ±0.005%	1 - 750 W	DeviceNet, 25 pin Analog, RS232	Show

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Specifications

Type

elite 13.56 MHz RF Plasma Generators
Frequency

13.56 MHz
Accuracy

±0.005%
Load Impedance Range

200 - 750 W, depending on model
Harmonic Output & Distortion

-20 to -30 dBc
Harmonic Output

-30 dBc
Input AC Power

Single phase, 110VAC - 253VAC, 50Hz / 60Hz
RF Connector

Type N
Remote Digital Interface

RS-232 via DB9F
Analog Interface

25-pin DB25F
Cooling

Air-cooled
Operating Temperature

5 - 40°C
Set Point Response Time

<10ms (analog)

Power Switch

Front Panel Switch
AC Input Connector

IEC Compliant Inlet
LED Indicators

PWR and STAT on rear panel
Watts Nominal into 1.1:1

elite 750: 750 W
elite 600: 600 W
elite 300: 300 W
Watts Nominal into 1.5:1

elite 750: 600 W
elite 600: 600 W
elite 300: 300 W
Watts Nominal into 2:1

elite 750: 486 W
elite 600: 486 W
elite 300: 300 W
Watts Nominal into 3:1

elite 750: 384 W
elite 600: 384 W
elite 300: 300 W
Watts Nominal into inf:1

elite 750: 100 W
elite 600: 200 W
elite 300: 200 W
Rack Size

elite 750 & 600: 2U, full rack
Dimensions

elite 750 & 600: 17 in. W x 15 in. D x 3.5 in. H
Weight

9.2 kg
Compliance

CE

Features

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elite™ 13.56 MHz RF Plasma Generators

elite™ 13.56 MHz RF Plasma Generators

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