elite™ 13.56 MHz RF Plasma Generators
elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
- Air cooled for lower facilities cost - does not require connection to factory cooling loop
- High efficiency design, DC to RF efficiency of >85% for low power consumption
- Compact half rack enclosure enables direct tool mounting
- Integrated single board design eliminates cables and connectors See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | ELITE-300HA-01RF Plasma Generator, 300 W, 13.56 MHz, 25-pin Analog Interface, Half Rack | |||||
| ELITE-300HD-01RF Plasma Generator, 300 W, 13.56 MHz, DeviceNet & Analog, Half Rack | |||||
 | ELITE-600FD-01RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Full Rack | |||||
| ELITE-600HA-01RF Plasma Generator, 600 W, 13.56 MHz, 25-pin Analog Interface, Half Rack | |||||
| ELITE-600HD-01RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Half Rack | |||||
| ELITE-600HP-01RF Plasma Generator, 600 W, 13.56 MHz, Profibus Interface, Half Rack | |||||
| ELITE-750FD-01RF Plasma Generator, 750 W, 13.56 MHz, DeviceNet & Analog, Full Rack |
Specifications
- Typeelite 13.56 MHz RF Plasma Generators
- Frequency13.56 MHz
- Accuracy±0.005%
- Load Impedance Range200 - 750 W, depending on model
- Harmonic Output & Distortion-20 to -30 dBc
- Harmonic Output-30 dBc
- Input AC PowerSingle phase, 110VAC - 253VAC, 50Hz / 60Hz
- RF ConnectorType N
- Remote Digital InterfaceRS-232 via DB9F
- Analog Interface25-pin DB25F
- CoolingAir-cooled
- Operating Temperature5 - 40°C
- Set Point Response Time<10ms (analog)
- Power SwitchFront Panel Switch
- AC Input ConnectorIEC Compliant Inlet
- LED IndicatorsPWR and STAT on rear panel
- Watts Nominal into 1.1:1elite 750: 750 W
elite 600: 600 W
elite 300: 300 W - Watts Nominal into 1.5:1elite 750: 600 W
elite 600: 600 W
elite 300: 300 W - Watts Nominal into 2:1elite 750: 486 W
elite 600: 486 W
elite 300: 300 W - Watts Nominal into 3:1elite 750: 384 W
elite 600: 384 W
elite 300: 300 W - Watts Nominal into inf:1elite 750: 100 W
elite 600: 200 W
elite 300: 200 W - Rack Sizeelite 750 & 600: 2U, full rack
- Dimensionselite 750 & 600: 17 in. W x 15 in. D x 3.5 in. H
- Weight9.2 kg
- ComplianceCE
Features
Low Cost of Ownership
- Air-cooled for lower facilities cost
- High efficiency design, DC to RF efficiency of >85% for low power consumption
- Wide input range allows for world wide installation without the need for special transformers
Ease of Installation
- Air cooling does not require connection to factory cooling loop
- Compact half rack enclosure enables direct tool mounting
- Standard IEC input connector eliminates the need for special wiring harnessing
- Single phase, wide AC input range allows ease of installation in world wide markets with varying AC line voltages
- Fused for operation on single or two phase systems
Exceptional Reliability
- Integrated single board design eliminates cables and connectors
- Patented inductive-clamp technology protects the generator from the most adverse VSWR load conditions and plasma fluctuations
Increased Value
- Field-Programmable Gate Array (FPGA) based control leads to fast control loop and generator protection from load transients
- Common Exciter (CEX) allows master slave operation and synchronization with other generators
- Optional LCD display and 6-button multifunction key pad allows local operation from the front panel
Resources
elite 300 RF Plasma Generator Specifications(443.5 kB, PDF) elite 600 RF Plasma Generator Specifications(461.9 kB, PDF) elite 750 RF Plasma Generator Specifications(463.6 kB, PDF)
Manuals
elite™ Series Full Rack Manual(874.6 kB, PDF) elite Series Half Rack Manual(818.8 kB, PDF)
Literature
elite™ RF Plasma Generators(762.7 kB, PDF)
