GE250A Elastomer Sealed Mass Flow Meter for Flow Rates Up to 250 SLM

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Overview

The GE250A is a general purpose, elastomer sealed MFM with flow measurement capability from 250 sccm to 250 slm Full Scale, N2 equivalent. The GE250A incorporates the latest in digital flow control electronics along with a well proven, patented thermal sensor and mechanical design. This MFM is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing accurate, and repeatable, flow measurement.

Embedded user interface allows changing range & gas and data collection in-situ
Finish enables MFM use in high purity applications
Wide choice of digital or analog I/O

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Products

Configuration Options

The following options are available for GE250A Mass Flow Meters
Ordering Code Example: GE250A013255TBR3020

Configuration Option	Option Code
GE250A Mass Flow Controller	GE250A
Gas (Per Semi Standard E52-0703)
Helium (He)	001
Argon = (Ar)	004
Hydrogen = (H₂)	007
Nitrogen (N₂)	013
Other Gas Options	See Here
Flow Range Full Scale
250 slm (250,000 sccm)	255
Fittings (compatible with)
12 mm Swagelok	F
0.375 in. tube compression	J
0.5 in. tube compression	S
0.5 in. tube compression long	W
0.5 in. NPT female	M
8 VCR Male	T
8 VCO Male	D
8 VCR Male long	L
8 VCO Male long	Q
W-Seal	H
Connector
Profibus (1179B Compatible)	3
Profibus (1480 Compatible)	4
RS485	5
DeviceNet	6
EtherCAT	8
PROFINET	9
15 pin D (Analog 0 to 5 VDC I/O)	B
15 pin D (4 to 20 mA I/O)	H
Seal Materials
Viton®	V
Buna	B
Neoprene	N
EPDM	E
Viton (USP Class VI Compliant)	W
Valve Type
Mass Flow Meter	3
Reserved
Reserved	0
Firmware
MKS will ship firmware revision current to date	20

* For gases not listed in the standard products gas table, please contact the MKS applications department for assistance.
** The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated by a decimal point. The third digit is the exponent of the power of ten. Example flow rate code: 255 is 2.5 x 10⁵ sccm or 250 slm; 105 is 1.0 x 10⁵ sccm or 100 slm

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	Description
	GE250A-MFM Mass Flow Controller, Multi-gas, Multi-range, Elastomer-sealed, 100-250 slm

Specifications

Type

Mass Flow Meter (MFM)
Full Scale Flow Range

100-250 slm (N2 equivalent)
Measurement Ranges

0.1% to 100 % of Full Scale (range on mech.)
Fitting Type

Compatible with:
12 mm Swagelok
0.375 in. tube compression
0.5 in. tube compression
0.5 in. tube compression long
0.5 in. NPT female
8 VCR Male
8 VCO Male
8 VCR Male long
8 VCO Male long
W-Seal
Seal Material

Viton®
Buna
Neoprene®
EPDM
Viton (USP Class VI Compliant)
Flow Input Output Signal

Voltage (0 to 5 VDC)
Current (4 to 20 mA)
Connector

Profibus (1179B Compatible)
Profibus (1480 Compatible)
RS485
DeviceNet
EtherCAT
PROFINET
15 pin D (Analog 0 to 5 VDC I/O)
15 pin D (4 to 20 mA I/O)
Maximum Inlet Pressure

150 psig
Burst Pressure

1500 psig
Typical Accuracy

±1% of Reading
Repeatability

±0.5% of Reading
Resolution

0.1% of Full Scale
Zero Temperature Coefficient

<0.05% of Full Scale/°C

Span Temperature Coefficient

<0.08% of Reading/°C
Inlet Pressure Coefficient

<0.03% of Reading/psi or less
Warm-up Time

1 hour
Operating Temperature

10-50°C
Storage Humidity

0 to 95% relative humidity, non-condensing
Storage Temperature

-20° to 65°C (-4° to 149° F)
External Leak Integrity

<1 x 10^-9 (scc/sec He)
Wetted Materials

316L S.S.
Surface Finish

16μ inch average Ra
Power Requirements

+15 to +24 VDC @ (<2 watts)
Weight

<3.4 lbs (1.54 kg)
Compliance

CE

Features

Accessories

Description	Compatibility	Avail.	Price
CB147-12-10 Cable, Mass Flow Controller, DB9, 10 ft.	UNIVERSAL	Show	$88
CB147-1-10 Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft.	UNIVERSAL	Show	$110
CB259-5-10 Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft.	UNIVERSAL	Show	$94