Configuration Options

The following options are available for GE300A Mass Flow Meters
Ordering Code Example: GE300A013305TBR3020

Configuration Option

Option Code
GE300A Mass Flow Controller GE300A
Gas (Per Semi Standard E52-0703)
Helium (He) 001
Argon = (Ar) 004
Hydrogen = (H2) 007
Nitrogen (N2) 013
Other Gas Options See Here
Flow Range Full Scale
300 slm (300,000 sccm) 305
Fittings (compatible with)
12 mm Swagelok F
0.375 in. tube compression J
0.5 in. tube compression S
0.5 in. tube compression long W
0.5 in. NPT female M
8 VCR Male T
8 VCO Male D
8 VCR Male long L
8 VCO Male long Q
W-Seal H
Connector
Profibus (1179B Compatible) 3
Profibus (1480 Compatible) 4
RS485 5
DeviceNet 6
EtherCAT 8
PROFINET 9
15 pin D (Analog 0 to 5 VDC I/O) B
15 pin D (4 to 20 mA I/O) H
Seal Materials
Viton® V
Buna B
Neoprene N
EPDM E
Viton (USP Class VI Compliant) W
Valve Type
Mass Flow Meter 3
Reserved
Reserved 0
Firmware
MKS will ship firmware revision current to date 20

* For gases not listed in the standard products gas table, please contact the MKS applications department for assistance.
** The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated by a decimal point. The third digit is the exponent of the power of ten. Example flow rate code: 255 is 2.5 x 105 sccm or 250 slm; 105 is 1.0 x 105 sccm or 100 slm

Description
GE300A Elastomer Sealed, Digital Mass Flow Meter Flow Rates Up to 300 SLM

GE300A-MFM

Mass Flow Meter, Multi-gas, Multi-range, Elastomer-sealed, 150-300 slm

Specifications

  • Type
    Mass Flow Meter (MFM)
  • Full Scale Flow Range
    150-300 slm (N2 equivalent)
  • Measurement Ranges
    0.1% to 100% of Full Scale (range on mech.)
  • Fitting Type
    Compatible with:
    12 mm Swagelok
    0.375 in. tube compression
    0.5 in. tube compression
    0.5 in. tube compression long
    0.5 in. NPT female
    8 VCR Male
    8 VCO Male
    8 VCR Male long
    8 VCO Male long
    W-Seal
  • Seal Material
    Viton®
    Buna
    Neoprene®
    EPDM
    Viton (USP Class VI Compliant)
  • Flow Input Output Signal
    Voltage (0 to 5 VDC)
    Current (4 to 20 mA)
  • Connector
    Profibus (1179B Compatible)
    Profibus (1480 Compatible)
    RS485
    DeviceNet
    EtherCAT
    PROFINET
    15 pin D (Analog 0 to 5 VDC I/O)
    15 pin D (4 to 20 mA I/O)
  • Analog Connector
    15 pin Type ‘’D’’ male
  • Maximum Inlet Pressure
    150 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of Reading
  • Repeatability
    ±0.5% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.03% of Reading/psi or less
  • Warm-up Time
    1 hour
  • Operating Temperature
    10-50°C
  • Storage Humidity
    0 to 95% relative humidity, non-condensing
  • Storage Temperature
    -20° to 65°C (-4° to 149° F)
  • External Leak Integrity
    <1 x 10-9
  • Wetted Materials
    316L S.S.
  • Surface Finish
    16μ inch average Ra
  • Power Requirements
    15-24 VDC @ (<2 watts)
  • Weight
    <3.4 lbs (1.54 kg)
  • Compliance
    CE

Features

Multi-gas/Multi-range Capable

The multi-gas/multi-range capability, along with tight performance specifications for accuracy, allow users to minimize inventory of high flow MFM part numbers. The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFM embedded diagnostic interface, that requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired full scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow, and store operating data for off-line analysis.

Communication Options/Specifications

Digital I/O DeviceNet™ RS485 Profibus® EtherCAT® PROFINET®
Input Power Required +11 to +25 VDC per (<2 watts) +15 to +24 VDC (<2 watts) +15 to +24 VDC (<2 watts) +24 VDC (<3 watts) +24 VDC (<3 watts)
Connector 5 pin micro connector (power and comm.) 9 pin Type D male (power and comm.) 9 pin Type D male (power)
9 pin Type D female (comm.)		 2 x RJ-45 (comm.) male, M8 male,
5 pin (power)		 2 x RJ-45 (comm.) male, M8 male,
5 pin (power)
Data Rate Switch/Selection 4 positions: 125, 250, 500K (Default)
(programmable over network)		 No switch Set data rate via RS485 No switch Set data rate via Profibus No switch No switch
Comm. Rate(s) 125 Kbps; 250 Kbps; 500 Kbps 9.6 Kbps; 19.2 Kbps 38.4 Kbps 9.6 Kbps to 12 Mbps 100 Mbps 100 Mbps
MAC ID Switches/Addresses 2 switches, 10 positions; 0,0 to 6,3 1 to 254 Set address over RS485 Station Addresses 0,0 to 9,9 2 switches, 10 positions 3 switches, 16 positions N/A
Network Size Up to 64 nodes Up to 32 nodes Up to 99 nodes Up to 4095 nodes N/A
Visual Indicators LED Network (green/red)
LED Module (green/red)		 LED Comm (yellow)
LED Error (red)		 LED Comm (green/red)
LED Error (green/red)		 LED Power (green)
LED Run (green)
LED Error (red)
LED Comm (green)		 LED Maint (amber)
LED BUS Fault (red)
LED Ready (green)
LED Sys Fault (red)
Compliance CE CE CE CE CE

Accessories

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Resources

Literature

Application Notes

Manuals

Drawings & CADs