GE300A Elastomer Sealed, Mass Flow Meter Flow Rates Up to 300 SLM
Overview
The GE300A is a general purpose, elastomer sealed MFM well suited for a wide variety of applications requiring flow measurement capability from 300 sccm to 300 slm Full Scale, N2 equivalent.The GE300A incorporates the latest in digital flow control electronics along with a well proven, patented thermal sensor and mechanical design. This MFM is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing accurate, and repeatable, Flow measurement.
- Embedded user interface allows changing range & gas and data collection in-situ
- Finish enables MFM use in high purity applications
- Wide choice of digital or analog I/O
Products
Configuration Options
The following options are available for GE300A Mass Flow Meters
Ordering Code Example: GE300A013305TBR3020
|
Configuration Option |
Option Code |
|---|---|
| GE300A Mass Flow Controller | GE300A |
Gas (Per Semi Standard E52-0703) |
|
| Helium (He) | 001 |
| Argon = (Ar) | 004 |
| Hydrogen = (H2) | 007 |
| Nitrogen (N2) | 013 |
| Other Gas Options | See Here |
Flow Range Full Scale |
|
| 300 slm (300,000 sccm) | 305 |
Fittings (compatible with) |
|
| 12 mm Swagelok | F |
| 0.375 in. tube compression | J |
| 0.5 in. tube compression | S |
| 0.5 in. tube compression long | W |
| 0.5 in. NPT female | M |
| 8 VCR Male | T |
| 8 VCO Male | D |
| 8 VCR Male long | L |
| 8 VCO Male long | Q |
| W-Seal | H |
Connector |
|
| Profibus (1179B Compatible) | 3 |
| Profibus (1480 Compatible) | 4 |
| RS485 | 5 |
| DeviceNet | 6 |
| EtherCAT | 8 |
| PROFINET | 9 |
| 15 pin D (Analog 0 to 5 VDC I/O) | B |
| 15 pin D (4 to 20 mA I/O) | H |
Seal Materials |
|
| Viton® | V |
| Buna | B |
| Neoprene | N |
| EPDM | E |
| Viton (USP Class VI Compliant) | W |
Valve Type |
| Mass Flow Meter | 3 |
Reserved |
|
| Reserved | 0 |
Firmware |
|
| MKS will ship firmware revision current to date | 20 |
* For gases not listed in the standard products gas table, please contact the MKS applications department for assistance.
** The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated by a decimal point. The third digit is the exponent of the power of ten. Example flow rate code: 255 is 2.5 x 105 sccm or 250 slm; 105 is 1.0 x 105 sccm or 100 slm
Specifications
-
TypeMass Flow Meter (MFM)
-
Full Scale Flow Range150-300 slm (N2 equivalent)
-
Measurement Ranges0.1% to 100% of Full Scale (range on mech.)
-
Fitting TypeCompatible with:
12 mm Swagelok
0.375 in. tube compression
0.5 in. tube compression
0.5 in. tube compression long
0.5 in. NPT female
8 VCR Male
8 VCO Male
8 VCR Male long
8 VCO Male long
W-Seal -
Seal MaterialViton®
Buna
Neoprene®
EPDM
Viton (USP Class VI Compliant) -
Flow Input Output SignalVoltage (0 to 5 VDC)
Current (4 to 20 mA) -
ConnectorProfibus (1179B Compatible)
Profibus (1480 Compatible)
RS485
DeviceNet
EtherCAT
PROFINET
15 pin D (Analog 0 to 5 VDC I/O)
15 pin D (4 to 20 mA I/O) -
Analog Connector15 pin Type ‘’D’’ male
-
Maximum Inlet Pressure150 psig
-
Burst Pressure1500 psig
-
Typical Accuracy±1% of Reading
-
Repeatability±0.5% of Reading
-
Resolution0.1% of Full Scale
-
Zero Temperature Coefficient<0.05% of Full Scale/°C
-
Span Temperature Coefficient<0.08% of Reading/°C
-
Inlet Pressure Coefficient<0.03% of Reading/psi or less
-
Warm-up Time1 hour
-
Operating Temperature10-50°C
-
Storage Humidity0 to 95% relative humidity, non-condensing
-
Storage Temperature-20° to 65°C (-4° to 149° F)
-
External Leak Integrity<1 x 10-9
-
Wetted Materials316L S.S.
-
Surface Finish16μ inch average Ra
-
Power Requirements15-24 VDC @ (<2 watts)
-
Weight<3.4 lbs (1.54 kg)
-
ComplianceCE
Features
Resources
Literature
Application Notes
Manuals
- G-Series Mass Flow Controller/Meter DeviceNetâ„¢ Supplement (112.5 kB, PDF)
- G-Series Mass Flow Controller/Meter RS485 Supplement (149.3 kB, PDF)
- G and I-Series Mass Flow Controller/Meter Profibus Manual Supplement (86.9 kB, PDF)
- G-Series Mass Flow Controller/Meter PROFINET Communications Supplement (1 MB, PDF)
- G-Series/I-Series MFC Modbus Register Map and Specification (502.9 kB, PDF)
- G-Series MFC Web Browser Tutorial (5.6 MB, PDF)
Drawings & CADs
- GE300A Mass Flow Controller/Meter Dimensional Drawing (230.5 kB, PDF)
Ultra-High Velocity