Multi-gas, Multi-range, Elastomer-sealed, 5 - 50,000 sccm Mass Flow Controllers,
Overview
The G-Series GE50A digitally-controlled mass flow controller is available with either RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
- Flow rates from 5 to 50,000 sccm
- Seal and valve plug options of Viton, Buna, Neoprene or Kalrez
- Wide choice of digital (EtherCAT, DeviceNet™, Profibus®, PROFINET and RS485) or analog (0-5 VDC or 4-20 mA) I/O
- Standard closed conductance leak rate of less than 0.1% of Full Scale
- Less than 750 millisecond settling time
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
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GE50A013101RMV020 |
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$1,940.00 |
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GE50A013102RMV020 |
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$1,940.00 |
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GE50A013102SMV020 |
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$1,940.00 |
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GE50A013103RMV020 |
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$1,940.00 |
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GE50A013103SMV020 |
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$1,940.00 |
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GE50A013201RMV020 |
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$1,940.00 |
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GE50A013202RMV020 |
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$1,940.00 |
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GE50A013203RMV020 |
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$1,940.00 |
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GE50A013204RMV020 |
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$1,940.00 |
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GE50A013204SMV020 |
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$1,940.00 |
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GE50A013501RMV020 |
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$1,940.00 |
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GE50A013502RMV020 |
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$1,940.00 |
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GE50A013503RMV020 |
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$1,940.00 |
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Configuration Options
The following options are available for GE50A Mass Flow Controllers
Ordering Code Example: GE50A013502R6V020
|
Configuration Option |
Option Code |
|---|---|
| GE50A Mass Flow Controller | GE50A |
Gas (Per Semi Standard E52-0703) |
|
| Nitrogen (N2) | 013 |
| Ammonia (NH3) | 029 |
| Sulfur Hexafluoride (SF6) | 110 |
| Other Gas Options | See Here |
Flow Range Full Scale |
|
| 5 sccm | 500 |
| 10 sccm | 101 |
| 20 sccm | 201 |
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
| 20000 sccm | 204 |
| 30000 sccm | 304 |
| 50000 sccm | 504 |
Fittings (compatible with) |
|
| Swagelok 4 VCR male | R |
| Swagelok 4 VCO male | G |
| 1/4'' Swagelok | S |
| Swagelok 8 VCR male | T |
| 1/8'' Swagelok | A |
| 1/2'' Swagelok | K |
| 6 mm Swagelok | M |
| 8 mm Swagelok | E |
| KF-16 | U |
| Swagelok 8 VCO Male | D |
| Swagelok 2 VCR Male | B |
| 10 mm Swagelok | P |
| 12 mm Swagelok | F |
| 3/8'' Swagelok | J |
| C-Seal | C |
Connector |
|
| EtherCAT | 8 |
| DeviceNet | 6 |
| RS485 (uses 9 pin connector) | 5 |
| Profibus (1480 Compatible) | 4 |
| Profibus (1179B Compatible) | 3 |
| PROFINET | 9 |
| Analog 0 to 5 VDC (9 pin D connector) | A |
| Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds | L |
| Analog 0 to 5 VDC (15 pin D connector) | B |
| Analog 0 to 5 VDC (15 pin D connector), Tied Grounds | M |
| Analog 4 to 20 mA (15 pin D connector) | H |
Seal Materials |
|
| Viton | V |
| Buna-N | B |
| Neoprene | N |
| Kalrez | K |
| EPDM | E |
Valve/Device Type |
|
| Normally Closed | 0 |
| Normally Open | P |
Firmware |
|
| MKS will ship firmware revision current to date | 20 |
Specifications
-
TypeMass Flow Controller
-
Full Scale Flow Range5 - 50,000 sccm
-
Control Range2% to 100% of Full Scale
-
Seal MaterialViton, Buna-N, Neoprene, or Kalrez
-
Analog Connector9-pin or 15-pin D-subminiture
-
Maximum Inlet Pressure150 psig
-
Normal Operating Pressure Differential10 to 5000 sccm; 10 to 40 psid, 10000 to 20000 sccm; 15 to 40 psid, 30000 to 50000 sccm; 25 to 40 psid
-
Proof Pressure1000 psig
-
Burst Pressure1500 psig
-
Typical Accuracy±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
-
Repeatability±0.3% of Reading
-
Resolution0.1% of Full Scale
-
Zero Temperature Coefficient<0.05% of Full Scale/°C
-
Span Temperature Coefficient<0.08% of Reading/°C
-
Inlet Pressure Coefficient<0.02% of Reading/psi
-
Typical Settling Time<750 msec, typical above 5% Full Scale
-
Warm-up Time30 minutes
-
Operating Temperature10°C to 50°C
-
Storage Humidity0 to 95% Relative Humidity, non-condensing
-
Storage Temperature-20° to 80°C
-
External Leak Integrity<1 x 10-09 (scc/sec He)
-
Leak Integrity Through Closed ValveUp to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
-
Wetted Materials316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
-
Surface Finish16µ inch average Ra
-
Weight3 lbs (1.4 kg)
-
ComplianceCE
Features
Resources
Literature
- GE50A Elastomer-sealed, Digital Mass Flow Controller (449.5 kB, PDF)
Other
Application Notes
- Gas Delivery for Plasma Spray Coating Applications (320.8 kB, PDF)
- MFCs for Gas Control in Case Hardening Processes (246.3 kB, PDF)
- Sample Gas Codes for Mass Flow Controllers/Meters
- Gas Correction Factors for Thermal-based Mass Flow
Manuals
- G and I Series Mass Flow Controller/Meter Manual (2.2 MB, PDF)
- G-Series Mass Flow Controller/Meter DeviceNet™ Supplement (112.5 kB, PDF)
- G-Series Mass Flow Controller/Meter RS485 Supplement (149.3 kB, PDF)
- G and I-Series Mass Flow Controller/Meter Profibus Manual Supplement (86.9 kB, PDF)
- G-Series Mass Flow Controller/Meter PROFINET Communications Supplement (1 MB, PDF)
- G-Series/I-Series MFC Modbus Register Map and Specification (502.9 kB, PDF)
- G-Series MFC Web Browser Tutorial (5.6 MB, PDF)
Drawings & CADs
- GE50A Mass Flow Controller 3D Model Files
- GE50 Mass Flow Controller Dimensional Drawing (1.9 MB, PDF)
Technical Notes
Device Description Files
- GE50A Profibus GSD File (1480 compatible) (2.6 kB, GSD)
- GE50A Profibus GSD File (1179B compatible) (2.5 kB, GSD)
- GE50A EDS File (346.2 kB, EDS)
- GE50A ESI File (132 kB, XML)
Ultra-High Velocity