The G-Series GE50A digitally-controlled mass flow controller is available with either RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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GE50A013101RMV020 |
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$1,940.00 |
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GE50A013102RMV020 |
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$1,940.00 |
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GE50A013102SMV020 |
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$1,940.00 |
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GE50A013103RMV020 |
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$1,940.00 |
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GE50A013103SMV020 |
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$1,940.00 |
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GE50A013201RMV020 |
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$1,940.00 |
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GE50A013202RMV020 |
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$1,940.00 |
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GE50A013203RMV020 |
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$1,940.00 |
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GE50A013204RMV020 |
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$1,940.00 |
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GE50A013204SMV020 |
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$1,940.00 |
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GE50A013501RMV020 |
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$1,940.00 |
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GE50A013502RMV020 |
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$1,940.00 |
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GE50A013503RMV020 |
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$1,940.00 |
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The following options are available for GE50A Mass Flow Controllers
Ordering Code Example: GE50A013502R6V020
Configuration Option |
Option Code |
---|---|
GE50A Mass Flow Controller | GE50A |
Gas (Per Semi Standard E52-0703) |
|
Nitrogen (N2) | 013 |
Ammonia (NH3) | 029 |
Sulfur Hexafluoride (SF6) | 110 |
Other Gas Options | See Here |
Flow Range Full Scale |
|
5 sccm | 500 |
10 sccm | 101 |
20 sccm | 201 |
50 sccm | 501 |
100 sccm | 102 |
200 sccm | 202 |
500 sccm | 502 |
1000 sccm | 103 |
2000 sccm | 203 |
5000 sccm | 503 |
10000 sccm | 104 |
20000 sccm | 204 |
30000 sccm | 304 |
50000 sccm | 504 |
Fittings (compatible with) |
|
Swagelok 4 VCR male | R |
Swagelok 4 VCO male | G |
1/4'' Swagelok | S |
Swagelok 8 VCR male | T |
1/8'' Swagelok | A |
1/2'' Swagelok | K |
6 mm Swagelok | M |
8 mm Swagelok | E |
KF-16 | U |
Swagelok 8 VCO Male | D |
Swagelok 2 VCR Male | B |
10 mm Swagelok | P |
12 mm Swagelok | F |
3/8'' Swagelok | J |
C-Seal | C |
Connector |
|
EtherCAT | 8 |
DeviceNet | 6 |
RS485 (uses 9 pin connector) | 5 |
Profibus (1480 Compatible) | 4 |
Profibus (1179B Compatible) | 3 |
PROFINET | 9 |
Analog 0 to 5 VDC (9 pin D connector) | A |
Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds | L |
Analog 0 to 5 VDC (15 pin D connector) | B |
Analog 0 to 5 VDC (15 pin D connector), Tied Grounds | M |
Analog 4 to 20 mA (15 pin D connector) | H |
Seal Materials |
|
Viton | V |
Buna-N | B |
Neoprene | N |
Kalrez | K |
EPDM | E |
Valve/Device Type |
|
Normally Closed | 0 |
Normally Open | P |
Firmware |
|
MKS will ship firmware revision current to date | 20 |