946 Vacuum System Controller
Overview
The 946 is a versatile half-rack vacuum gauge measurement and control system. It provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. This highly flexible vacuum system controller supports a wide range of sensor technologies, including Baratron® capacitance manometers, cold cathode, hot cathode, standard Pirani and convection Pirani sensors for a measurement range from ultra-high vacuum to above atmospheric pressure.
- Simultaneous control and display six vacuum gauges and/or mass flow controllers
- Pressure readings from 10,000 Torr down to 10-11 Torr
- Closed-loop pressure control option for use with MKS valves
- RS232/485 computer control standard in all configurations for ease of system integration
- Flow ratio control using multiple mass flow controllers
- Communication between gauges enables a reference sensor to span or zero another gauge
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
|
Base Vacuum Gauge Controller, RS232 and RS485, Series 946, US Region
$2,231.00
|
946-US-NANANA-NA Base Vacuum Gauge Controller, RS232 and RS485, Series 946, US Region | $2,231.00 |
|
Configuration Options
The following options are available for 946 Vacuum System Controllers
Ordering Code Example: 946-US-CMFCNA-PC
| Configuration Option | Option Code |
|---|---|
|
946 Vacuum System Controller |
946 |
Power Cable |
|
| United States | US |
| Europe | EU |
| Japan | JP |
| United Kingdom | UK |
| Canada | CA |
Card Slot A |
|
| Cold Cathode | CC/CL |
| Dual Convection Pirani/ Standard Pirani | CT |
| Dual Baratron®/Piezo | CM |
| Hot Cathode LPN/ Mini-Ion Gauge | HC |
| Dual Mass Flow Controller | FC |
| Blank | NA |
Card Slot B |
|
| Cold Cathode | CC/CL |
| Dual Convection Pirani/ Standard Pirani | CT |
| Dual Baratron®/Piezo | CM |
| Hot Cathode LPN/ Mini-Ion Gauge | HC |
| Dual Mass Flow Controller | FC |
| Blank | NA |
Card Slot C |
|
| Cold Cathode | CC/CL |
| Dual Convection Pirani/ Standard Pirani | CT |
| Dual Baratron®/Piezo | CM |
| Hot Cathode LPN/ Mini-Ion Gauge | HC |
| Dual Mass Flow Controller | FC |
| Blank | NA |
Communication / Pressure Control Slot |
|
| Blank | NA |
| Pressure Control | PC |
Specifications
-
Measurement Range10,000 Torr to 10-11 Torr (Dependent upon sensor type)
-
Display320x240 color QVGA TFT LCD with back lighting
-
Front Panel ControlsPower on-off switch, setup and operational commands can be accessed via the keypad
-
UnitsPressure: Torr, mbar, Pascal
Flow: sccm and slm -
Power Requirements100-240 VAC 50/60 Hz 150 W maximum
-
Analog OutputBuffered, log linear and linear output for each channel and log linear for combined channels
-
Set Point Contact Rating2 amps @ 30 VAC
-
Set Point ConfigurationTwelve pressure dependent SPST set point relays
-
Operating Temperature5-40°C (41-104°F)
-
Storage Temperature10-55°C (50-131°F)
-
Mounting1/2 rack, 2U High, 13 inches deep
-
Weight8 lbs. (3.6 kg)
-
ComplianceCE
Features
Resources
Drawings & CADs
- 946 Vacuum System Controller Dimensional Drawing (176.7 kB, PDF)
Literature
- 946 Vacuum System Controller (735.5 kB, PDF)
- Vacuum Measurement Product Guide (711.5 kB, PDF)
Manuals
- 946 Vacuum System Controller Manual (1.7 MB, PDF)
Ultra-High Velocity