High Accuracy In-Situ Mass Flow Verifier
Overview
Enables "Wafer-to-Wafer" "Chamber-to-Chamber" & "Tool-to-Tool" Matching
The HA-MFV, High Accuracy Mass Flow Verifier is designed for use on process tools to verify mass flow control flow rates in-situ. Available with EtherCAT® or DeviceNet™ communications and measurement accuracy of 1.0% of reading, the HA-MFV can verify MFC flow with the actual process gas significantly better than older rate-of-rise devices or process chamber rate-of rise methods.
- 1.0% accuracy for wafer-to-wafer, chamber-to-chamber, & tool-to-tool process matching
- Supports multiple gas panels to reduce implementation costs
- 5 to 3000 sccm measurement range for a wide variety of processes
- In-situ assessment of MFC flow rate improves process control and avoids unneeded down-time
Products
Specifications
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Mass Flow Verification Accuracy±1.0% of Reading
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Mass Flow Verification Range5 - 3000 sccm (N2 equivalent)
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Repeatability±0.5% of Reading
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Reproducibility±0.3% of Reading
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Pressure Range100 Torr
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Pressure Accuracy0.25% of Reading
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Proof Pressure45 psia
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Burst Pressure150 psig
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Minimum Penumatic Air Supply Pressure80 psig
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Maximum Penumatic Air Supply Pressure100 psig
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Span Temperature Coefficient<0.002% Reading/°C
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Warm-up Time60 minutes
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Operating Temperature10° to 40°C
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Temperature Display0 - 100°C
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Temperature Accuracy± 2°C
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Temperature Resolution0.1°C
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Storage Humidity0 to 95% RH non-condensing
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Storage Temperature-20° to 60°C
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Control InterfaceDeviceNet: 5-pin DeviceNet Micro Connector Type, EtherCAT: Dual RJ-45 (Comm.) M8 Male 5pin (PWR)
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Diagnostic InterfaceEthernet RJ-45 female
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Input Voltage11 to 25 VDC
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Gas Supply FittingSwagelok® compatible 8-VCR® female, rotatable
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Vacuum Supply FittingSwagelok® compatible 8-VCR® male type, rotatable
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Pneumatic Air Supply Fitting1/8 inch one-touch quick connect tube
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External Leak Integrity<1 x 10-9 scc/sec He
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Wetted Materials316L SST passivated, Inconel, Incoloy
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Seal Material316 SST nickel plated
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Valve Seat MaterialPCTFE with Elgiloy® Diaphragm
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Surface Finish<32 µ inches Ra
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Dimensions6.98 x 10.0 x 10.0 in.
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Weight23.9 lbs
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ComplianceCE
Features
Resources
Literature
- HA-MFV, DeviceNet™ High Accuracy Mass Flow Verifier Data Sheet (369.6 kB, PDF)
- HA-MFV, EtherCAT® High Accuracy Mass Flow Verifier Data Sheet (353.8 kB, PDF)
Technical Notes
Manuals
- HAMFV Technology Manual (10277599-001) (3 MB, PDF)
- HAMFV EtherCAT Module & Object Dictionary (20041006-001) (505.8 kB, PDF)
- HAMFV DeviceNet Profile Manual Supplement (663.6 kB, PDF)
Ultra-High Velocity