PC99 Absolute Pressure Controller with Mass Flow Meter

1000 Torr, 2000 Torr, 100 Psia

Swagelok 4 VCR Male, 1-1/8” surface mount (C-seal, W-seal)

Normally Closed or Normally Open

PTFE (Teflon) or Sapphire (Metal)

(sccm) 50, 200, 1000, 5000, 10000, 20000, 30000

Two open collector transistors, adjustable from 0 to 100% of Full Scale
Rated Current: 30VDC/250mA
State: On, above, or below trip point
Hysteresis: 3% of Full Scale (factory set)
Status: LEDs Red when the transistor is on

(For all Torr Full Scale ranges) Torr, kPa; (For Psi Full Scale Range) Psi, kPa

0.1 Torr for 0 to 100 Torr, 1 Torr for >1000 Torr, 0.1 Psi for 0 to 100 Psi

± 0.2% of Full Scale (< 10% Full Scale); ± 1.0% of Reading (≥ 10% Full Scale)

2x Full Scale for all ranges

45 Psid

1500 Psig

Downstream

± 1.0% of Reading

± 0.02% of Full Scale /°C

± 0.04% of Reading /°C

> 2 to 100% of Full Scale

< 1.0 second

10 to 50°C (50 to 122°F)

-20 to 80°C (-4 to 176°F)

0 to 95% relative humidity, non-condensing

<1 x 10^-10

<1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)

2% to 100% of Full Scale

± 0.2% of Full Scale

0.1% of Full Scale

± 1.0% of Reading >10% of Full Scale (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)

< 0.08% of Reading/°C

<0.05% of Full Scale/°C

Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy, KM-45, Inconel® 718, 825 Incoloy®
Optional: (Valve Seat) PTFE (Teflon) or Sapphire (Metal)

5 µinches, average Ra

+15 to +24 VDC @ 350mA max

15-pin Type “D” Male

0 to 10 VDC (Default), 0 to 5 VDC (User Switchable)

0 to 5 VDC

< 1 Ω

DeviceNet: +11 to +25 VDC per DeviceNet specification (@ <3.5 watts)
RS485: +15 to +24 VDC @ 350mA max

DeviceNet: 5 pin microconnector (DeviceNet)
RS485: 9 pin Type D male

DeviceNet: 4 positions: 125, 250, 500K (Default), PGM (programmable over the network)
RS485: 3 positions: 9.6, 19.2, 38.4K (Default)

125 - 500 Kbps (user selectable)

9.6 - 38.4 Kbps (user selectable)

DeviceNet: 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers; 7,0 to 9,9 are software ID numbers; (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3)
RS485: 2 switches, 10 positions; 0,0 to 9,9. Available MAC ID’s are 3,2 to 9,9.

DeviceNet: Linear (trunkline/dropline) power and signal on same network cable
RS485: Master/slave

DeviceNet: Up to 64 nodes
RS485: Up to 32 nodes

DeviceNet: LED network status (green/red) LED module status (green/red), Scrolling LED displays (piPC Type, Pressure Full Scale, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31)) Push Button Display toggles between (Pressure in TORR & KPA or PSI & KPA, Flow, Temperature and Scrolling display)
RS485: LED network status (green/red) LED module status (green/red)

°C

± 2°C

0.1°C

0 to 100°C

< 3 lbs (1.36 kg)