1. Products
  2. Heater Jackets & Process Traps
  3. Foreline Process Traps
  4. Wet Scrubber Inlet Transitions
  5. Scrubber Inlet Transition Kits

Scrubber Inlet Transition Kits

Overview Features Resources Contact Us

Scrubber Inlet Transition Kits

Overview Features Resources Contact Us

Wet scrubbers are used in many semiconductor processes to treat byproducts. Water in the scrubber often migrates back into the exhaust line. This can cause surface chemical reactions to occur with system byproducts, which in turn solidify and clog the inlet. This results in system downtime to clean the scrubber inlet. Our Scrubber Inlet Transition Kits are customized to the process chemistries to prevent chemical reactions from occurring or reduce sublimation and keep byproducts moving into the scrubber.

©2025 MKS Inc. All rights reserved.

United States flag
Terms of UsePrivacy
Support: (978) 645-5500 Mon.-Fri. 8am - 5pm EST
Facebook YouTube LinkedIn