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  4. C-Series Compact, Ultrafast Mass Flow Controllers

C-Series Compact, Ultrafast Mass Flow Controllers

C-Series Mass Flow Controllers (MFC) are compact, fast-response models using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. It is available in Full Scale flow rates from 15 to 14,000 sccm (N2) with a control range from as low as 0.1% of Full Scale up to 100% of Full Scale. Analog (0 to 5 VDC), RS485, PROFINET® and Modbus communications interfaces are available. 

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CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Controller

CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Controller

  • Ultrafast response time of <100 msec
  • Control range from 0.1 to 100% of Full Scale
  • Accuracy of ±0.8% of set point
1 Product
CMA50A 14,000-50,000 sccm Compact, Fast Response Mass Flow Controller

CMA50A 14,000-50,000 sccm Compact, Fast Response Mass Flow Controller

  • Ultrafast response time of <100 msec
  • Control range from 0.1 to 100% of Full Scale
  • Accuracy of ±0.8% of set point
1 Product
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