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Description
CMA10B-MFC 15-14,000 sccm Compact, Fast Response Mass Flow Controller

Specifications

  • Type
    Mass Flow Controller
  • Full Scale Flow Range
    15-14,000 sccm (N2)
  • Maximum Inlet Pressure
    80 psig
  • Normal Operating Pressure Differential
    15 to 7000 sccm: 10 to 45 psid (N2)
    7001 to 14000: 15 to 45 psid (N2)
  • Proof Pressure
    232 psi/16 bar
  • Burst Pressure
    1000 psi/70 bar
  • Control Range
    Digital I/O: 0.1-100% of Full Scale
    Analog I/O: 0.2-100% of Full Scale
    (typical)
  • Typical Accuracy
    ±0.8% of set point for 20-100% Full Scale
    ±0.16% of Full Scale for <20% of Full Scale
    (with N2 calibration gas)
  • Repeatability
    ±0.2% of Reading
  • Zero Temperature Coefficient
    ≤0.005% of Full Scale/°C
  • Span Temperature Coefficient
    ≤0.06% of Reading/°C
  • Pressure Coefficient
    <0.025% of Reading/psi
  • Response Time
    ≤100 ms typical above 10% Full Scale, 50 sccm - 5 slm Full Scale models
    ≤150 ms typical above 10% Full Scale, 10 slm Full Scale models
    (per SEMI Guideline E-17-0600)
  • Warm-up Time
    ≤1 min
  • Operating Temperature
    10-50°C (32-122°F)
  • Storage Temperature
    0-60°C (32-140°F)
  • Fitting Type
    Compatible with:
    Swagelok® 4 VCR® male
    surface mount (o-ring)
    0.25 in. Swagelok compression
  • External Leak Integrity
    <1 x 10-09 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <0.1% of max. Full Scale range using valve closed override command
    (to assure no flow-through, a separate positive shut-off valve is required)
  • Wetted Materials
    Aluminum, Elgiloy®, 20# Steel, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
  • Seal Material
    Viton
  • Valve Position
    Normally closed
  • Set Point Command Signal
    0-5 VDC (0-10 VDC, optional)
  • Power Requirements
    24 VDC @ (±10%), <4 watts
  • Flow Input Output Signal
    0-5 VDC (0-10 VDC, optional)
  • Analog I/O Connector
    9-pin Type D
  • Weight
    0.68 lbs (310 grams) (w/VCR fitting)
  • Compliance
    CE

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