CMA50A 14,000-50,000 sccm Compact, Fast Response Mass Flow Controller
Overview
The C-Series CMA50A Mass Flow Controller (MFC) is a compact, fast response model using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. The device is available in Full Scale flow rates from 14000 sccm to 50000 sccm, N2 with a control range from as low as 0.1% of Full Scale up to 100% of Full Scale and is also available as a flow meter. Either analog (0 to 5 VDC) or digital (RS485, PROFINET® or Modbus TCP/IP) communication interfaces are available. The required power supply voltage is 24 VDC nominal.
- Ultrafast response time of <100 msec
- Control range from 0.1 to 100% of Full Scale
- Accuracy of ±0.8% of set point
- Minimal zero and span drift assure long term reproducibility
- Surface mount interface available for compact gas panel design
- Embedded web browser for setup and diagnostics
Products
Configuration Options
The following options are available for CMA50A Mass Flow Controllers & Meters
Ordering Code Example: CMA50A013504RCV1010
|
Configuration Option |
Option Code |
|---|---|
Controller |
|
| CMA50A | CMA50A |
Gas (Per Semi Standard E52-0703) |
|
| He | 001 |
| Ar | 004 |
| Air | 008 |
| N2 | 013 |
| O2 | 015 |
| SF6 | 110 |
| For other gases, contact MKS Instruments Flow range is based on gas - see the Selection Table below. |
|
Flow Range Full Scale |
|
| 20000 sccm | 204 |
| 30000 sccm | 304 |
| 40000 sccm | 404 |
| 50000 sccm | 504 |
Fittings (compatible with) |
|
| 4 VCR Male | R |
| 0.25 in. Compression | S |
| Downmount O-ring Seal | C |
| W-Seal (1.125 in. Wide Seal Configuration) | H |
| For other options, contact MKS Instruments | |
Connector |
|
| Dual I/O (Analog 9-Pin/RS485 ASCII) RS-485 Primary | R |
| Dual I/O (Analog 9-Pin/RS485 ASCII) Analog Primary | C |
| Modbus TCP | M |
| PROFINET | 9 |
Seal Materials |
|
| Viton | V |
Valve/Device Type |
|
| Normally Closed/Mass Flow Controller (MFC) | 1 |
| No Valve/Mass Flow Meter (Same length as MFC) | 3 |
| No Valve/Mass Flow Meter (Reduced Length) Reduced length not available for W-Seal or Downmount O-ring Seal fittings |
4 |
Reserved (future use) |
|
| Standard Build | 0 |
Firmware |
|
| RS485/Analog Dual I/O | 10 |
| Modbus TCP | 10 |
| PROFINET | 10 |
Specifications
-
TypeMass Flow Controller
-
Full Scale Flow Range14,001-50,000 sccm (N2)
-
Maximum Inlet Pressure80 psig
-
Normal Operating Pressure Differential14001 to 50000 sccm: 30 to 45 psid (N2)
-
Proof Pressure232 psi/16 bar
-
Burst Pressure1000 psi/70 bar
-
Control RangeDigital I/O: 0.1% to 100% of Full Scale
Analog I/O: 0.2% to 100% of Full Scale -
Typical Accuracy±0.8% of set point for 20 to 100% Full Scale
±0.16% of Full Scale for <20% of Full Scale
(with N2 calibration gas) -
Repeatability±0.2% of Reading
-
Zero Temperature Coefficient≤0.005% of Full Scale/°C
-
Span Temperature Coefficient≤0.06% of Reading/°C
-
Pressure Coefficient<0.025% of Reading/psi
-
Response Time≤100 ms typical above 10% Full Scale, 50 sccm - 5 slm Full Scale models
≤150 ms typical above 10% Full Scale, 10 slm Full Scale models
(per SEMI Guideline E-17-0600) -
Warm-up Time≤1 min (to within 0.2% of Full Scale of set point)
-
Operating Temperature10-50°C (32-122°F)
-
Storage Temperature0-60°C (32-140°F)
-
Fitting TypeCompatible with:
Swagelok® 4 VCR® male
surface mount (o-ring and w-seal)
0.25 in. Swagelok compression -
External Leak Integrity<1 x 10-09 (scc/sec He)
-
Leak Integrity Through Closed Valve<0.1% of max. Full Scale range using valve closed override command
(to assure no flow-through, a separate positive shut-off valve is required) -
Wetted MaterialsAluminum, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
-
Seal MaterialViton
-
Valve PositionNormally closed
-
Set Point Command Signal0-5 VDC (0-10 VDC, optional)
-
Power Requirements24 VDC @ (±10%), <4 watts
-
Flow Input Output Signal0-5 VDC (0-10 VDC, optional)
-
Analog I/O Connector9-pin Type D
-
Weight0.68 lbs (310 grams) (VCR)
-
ComplianceCE
Features
Resources
Literature
Drawings & CADs
- C-Series Mass Flow Controller/Meter 3D Model Files
- C-Series Mass Flow Controller Dimensional Drawing (2 MB, PDF)
Manuals
- C-Series Mass Flow Controller Pin-outs (94 kB, PDF)
- C-Series Mass Flow Controller/Meter Manual (2 MB, PDF)
- C-Series MFC/MFM Modbus Register Map & Specification (135.9 kB, PDF)
Application Notes
- Sample Gas Codes for Mass Flow Controllers/Meters
- Gas Correction Factors for Thermal-based Mass Flow
Device Description Files
- C-Series MFC/MFM PROFINET GSDML File (.XML) (30.5 kB, XML)
Ultra-High Velocity