LIQUOZON® VariO3 Ozonated Water Delivery System
Overview
MKS' LIQUOZON® VariO3 is a dissolved ozone gas delivery system providing high purity ozone in ultrapure water for Semiconductor and Electronic Thin Film applications like contaminant removal and surface conditioning via wet clean or rinsing methods. The high redox potential of ozone causes rapid conversion back to oxygen making it an environmentally friendly alternative to other chemical processes.
The VariO3 system has user controllable and configurable dissolved ozone concentration and flow rates, meeting specific requirements for a wide range of applications. The modular and versatile mechanical system interface makes it easy to integrate and service in today's equipment facilities and meets the latest safety and monitoring requirements.
- Ensures high purity surfaces by removing organic, metallic and particle contamination
- High yield oxide growth created by superior concentration control
- Unit to unit control for repeatable process performance
- Cost effective water, power and chemical consumption management reduces operational spending
- Eliminates environmental waste impact with easy conversion back to oxygen
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
|
LIQUOZON-VariO3 Ozonated Water Delivery System, 3-90 ppm, 2-140 lpm, Optional Recirculation |
|
Specifications
-
TypeOzone Water Delivery System
-
Ozone Concentration3-90 ppm
-
Flow Rate2-140 lpm
-
Feed GasO2
-
Dopant GasCO2
-
Wetted SurfacesLiquid: PFA, PTFE, quartz glass
Gas: 316L stainless steel, PFA, PTFE -
Control InterfacesBinary in/out, RS232/RS485, analog 4 - 20 mA in/out, USB
-
Dimensions1810 x 800 x 610 mm (71.2 x 31.5 x 24.1 inches)Approximate (height x width x depth), Overall height including exhaust duct and adjustable feet: Approx. 2000 mm (79 inches)
-
Weight315-400 kg, depending on configuration
-
ComplianceCE, SEMI F47, SEMI S2
Features
Resources
Literature
- LIQUOZON® VariO3 Dissolved Ozone Delivery System (310.6 kB, PDF)
- LIQUOZON® VariO3 Dissolved Ozone Delivery System for Electronic Thin Film Applications (2 MB, PDF)
Drawings & CADs
Application Notes
- Ozone Data Conversion Tables (289.1 kB, PDF)
- Ozone Applications in the Semiconductor Industry (2.2 MB, PDF)
- Reduce Ultrapure Water UPW Usage Using MKS Reclaim Technology (1.5 MB, PDF)
Ultra-High Velocity