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Compact Ozone Gas Delivery Systems
MKS compact ozone gas delivery systems provide full ozone delivery capability in a small, compact footprint making them easy to integrate in space constrained manufacturing environments. The integrated solutions provide high precision ozone delivery for advanced thin film processes like Atomic Layer Deposition (ALD). All compact solutions are modular and configurable to meet a wide range of customer needs while providing increased processing capability.
O3CS Compact Ozone System
- High quality thin films created using Grade 6 gas
- Configurable to adapt ozone output to specific process steps such as deposition of Al2O3
- Clean, safe alternative to conventional chemical processing
AX8555 Stand-Alone Low Flow Ozone Delivery System
- Specifically designed for lower flow for advanced applications such as ALD
- Closed-loop concentration for tighter process control
- Configurable with up to four (4) independent channels to support multiple ALD tools or chambers concurrently
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