AX8555 Stand-Alone Low Flow Ozone Delivery System
Overview
The AX8555 Ozone Delivery Subsystem supports multiple chambers or tools to provide ultra clean ozone gas. The AX8555 is a fully integrated, lower flow ozone gas delivery system specifically designed for advanced semiconductor process applications such as Atomic Layer Deposition (ALD). ALD is a self-limiting "pulsed" process that sequentially introduces reactants into the process chamber in the gas phase to build successive monolayers of film on the wafer. By appropriately selecting the precursor materials, parameters such as growth rate, reaction temperature, impurity levels, and crystallinity of the deposited films can be influenced. Films grown using ozone as an oxidizer in ALD are very high quality, stoichiometric, uniform, dense and free from any significant contamination.
- Specifically designed for lower flow for advanced applications such as ALD
- Closed-loop concentration for tighter process control
- Configurable with up to four (4) independent channels to support multiple ALD tools or chambers concurrently
- Ultra clean ozone
Products
Specifications
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TypeOzone Gas Delivery System
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Ozone Output26 - 180 g/hr per channel
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Flow Rate0.5 - 5 slm per channel
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Feed GasOxygen, Nitrogen (20 - 100 ppm of total flow), Carbon Dioxide (1000 - 2000 ppm of total flow)
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Feed Gas Supply Pressure60 psig (4.2 kg/cm2) nominal, 75 psig (5.3 kg/cm2) maximum, N2/CO2 pressure 10 psi higher than O2 pressure
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Feed Gas Purity99.9995% minimum
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Operating Temperature41 - 104°F (5 - 40°C)
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Cooling Water Temperature Required63 - 73°F (17 - 23°C)
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Cooling Water Filtration Required20µm
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Cooling Water Quality RequiredDemineralized
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Cooling Water Minimum Flow Required1.0 gpm (2.3 - 3.8 slm) minimum to 1.6 gpm max. per channel (depending on configuration)
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Cooling Water Connections Required1/2 in. compression (Swagelok®)
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Cooling Water Flow Control/Indication RequiredVariable - area flow meter with valve
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Cooling Water Pressure Indication RequiredInlet pressure gauge
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Voltage Requirements208 volts AC (±10%), three phase
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Current Requirements15 Amps RMS, 30 Amps service, 31 Amps RMS, 50 amps service (depending on configuration) minimum of 10,000 A.I.C.
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Frequency50/60 Hz
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Pressure IndicationInlet pressure gauge for each gas
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Exhaust Flow Rate150 cfm (70.8 l/s)
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Exhaust TypeSEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
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Exhaust Static Pressure0.10 in. (2.54 mm) H2O minimum measured at the bottom of the duct flange adapter on cabinet
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Control Air Pressure70 - 100 psig
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Control Air TypeCDA or dry nitrogen, 40µm filtered
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Control Air Fitting1/4 in. compression (Swagelok®)
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Exhaust Connection6 - in. diameter duct opening
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Dimensions24 x 75 x 36 in. (610 x 1575 x 914 mm) (width x height x depth)
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Relative Humidity30 - 90% (non - condensing)
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Weight600 lbs.(272 kg) for system with one generator,880 lbs.(400 kg) for system with four generators
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ComplianceCE, S2 - 0302, F47
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AltitudeUp to 3280 ft. (1000 m) above mean sea level
Features
Resources
Literature
- AX8555 Stand-alone Low Flow Ozone Delivery System (248.1 kB, PDF)
Application Notes
- Ozone Data Conversion Tables (289.1 kB, PDF)
Drawings & CADs
- AX8555 Ozone Delivery System Dimensions (113.4 kB, PDF)
Ultra-High Velocity