SmartPower® Intelligent Microwave Generators
Overview
SmartPower® AX2500 Series intelligent microwave power generators are built on proven experience in designing rugged, reliable microwave power generators for demanding semiconductor fabrication and industrial applications. The compact AX2500 design architecture incorporates field-proven technology, and combines new design features aimed at improved performance and lower cost of ownership.
- Available in 1.8 and 3 kW power levels for 200 and 300 mm applications
- Microprocessor-controlled filament cutback extends magnetron tube lifetime.
- Accurate power measurement and feedback ensures high repeatability
- Compact, modular design enhances cross-platform compatibility
- Field-replaceable magnetron tubes lower overall cost of ownership
Products
Specifications
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TypeIntelligent Microwave Generator
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Frequency2440 - 2470 MHz
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Ripple±1% of output power
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Output Accuracy±1.5% (from 20-100% of max. power)
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Ambient TemperatureUp to 40°C maximum
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Generator to Head DistanceUp to 100 feet maximum
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Microwave ConnectionsWR284F waveguide with CPR284F flanges
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Power Requirements200/208 VAC ±10%, 3 phase, 50/60 Hz
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ComplianceCE, ETL, Semi S2-93A, F47
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CoolingWater, 1.5 gpm, 30°C maximum @ 30 psid minimum, air
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Power Supply Generator Dimensions7.0 inches H x 19 inches W x 23 inches L (178 x 483 x 584mm)
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Power Head Magnetron Head Dimensions10 inches H x 7.62 inches W x 14.5 inches D (254 x 193.5 x 368.3mm)
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RegulationBetter than 1% of output power (line and load)
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Remote ControlAnalog, RS485, DeviceNet™
Features
Resources
Literature
- AX2500 Series SmartPower® Microwave Generators (218.7 kB, PDF)
Ultra-High Velocity