SmartPower® Intelligent Microwave Generators

SmartPower® AX2500 Series intelligent microwave power generators are built on proven experience in designing rugged, reliable microwave power generators for demanding semiconductor fabrication and industrial applications. The compact AX2500 design architecture incorporates field-proven technology, and combines new design features aimed at improved performance and lower cost of ownership.

Available in 3 kW power levels for 200 and 300 mm applications
Microprocessor-controlled filament cutback extends magnetron tube lifetime.
Accurate power measurement and feedback ensures high repeatability
Compact, modular design enhances cross-platform compatibility
Field-replaceable magnetron tubes lower overall cost of ownership

See All Features

	Compare	Description	Compatibility	Drawings, CAD & Specs	Frequency	Avail.	Price
		AX2530Microwave Power Generator, 3.0 kW, 2455 MHz	UNIVERSAL		2440 - 2470 MHz

Specifications

Type
Intelligent Microwave Generator
Frequency
2440 - 2470 MHz
Ripple
±1% of output power
Output Accuracy
±1.5% (from 20-100% of max. power)
Ambient Temperature
Up to 40°C maximum
Generator to Head Distance
Up to 100 feet maximum
Microwave Connections
WR284F waveguide with CPR284F flanges

Power Requirements
200/208 VAC ±10%, 3 phase, 50/60 Hz
Compliance
CE, ETL, Semi S2-93A, F47
Cooling
Water, 1.5 gpm, 30°C maximum @ 30 psid minimum, air
Power Supply Generator Dimensions
7.0 inches H x 19 inches W x 23 inches L (178 x 483 x 584mm)
Power Head Magnetron Head Dimensions
10 inches H x 7.62 inches W x 14.5 inches D (254 x 193.5 x 368.3mm)
Regulation
Better than 1% of output power (line and load)
Remote Control
Analog, RS485, DeviceNet™

Features

Modular Architecture

All generators share a common, modular architecture and accurate power measurement, feedback and control for increased process control and reproducibility. All models have feedback-controlled power regulation of 0.1% of output power (line and load) and ripple of <±1% of output power. PrecisionPower™ technology improves accuracy of power control to <±1.5% of maximum power for increasing process consistency and yield. In addition, the PrecisionPower™ technology allows magnetrons to be replaced in the field, substantially reducing cost of ownership.

Microwave Plasma Subsystem

Intelligent Diagnostics

The AX2500 Series SmartPower® control technology monitors the generator’s operating system and provides power shutdown protection and intelligent diagnostics. The simple messages displayed on the SmartPower® generator front panel give the user all the information needed to understand system status, reduce MTTR and ensure maximum uptime.

SmartPower® generator microwave power accuracy during plasma operation. Forward power within ±1.5% of maximum power. Tests performed using AX7610 applicator. Reflected power minimized with SmartMatch to less than 1% in less than 2 sec.