SmartPower® 2455 MHz Intelligent Microwave Generators
Model: AX2530
SmartPower® 2455 MHz Intelligent Microwave Generators
Model: AX2530
Overview
Overview
The SmartPower® AX2530 Microwave Generators supports demanding semiconductor fabrication and industrial applications with 1.8 to 3.0 kW at 2440 to 2470 MHz. The compact AX2500 design architecture incorporates MKS field-proven technology, and combines new design features aimed at improved performance and lower cost of ownership.
Technical Specs
- TypeMicrowave Generator
- Maximum Plasma Power Output3.0 kW
- Power Output±1.5% (from 20 - 100% of max. power)
- Frequency2440 - 2470 MHz
- Ripple±1% of output power
- Ambient Temperatureup to 40°C max.
- Generator to Head DistanceUp to 100 feet maximum
- Microwave ConnectionsWR284F waveguide with CPR284F flanges
- Power Requirements200/208 VAC ±10%, 3 phase, 50/60 Hz
- ComplianceCE, ETL, Semi S2-93A, F47
- CoolingWater, 1.5 gpm, 30°C maximum @ 30 psid minimum
- Power Supply Generator Dimensions7.0 x 19 x 23 in. (178 x 483 x 584 mm) (height x width x depth)
- Power Head Magnetron Head Dimensions10 x 7.62 x 14.5 in. (254 x 193.5 x 368.3mm) (height x width x depth)
- Remote ControlAnalog, RS485, DeviceNet™,
Technical Specs
- TypeMicrowave Generator
- Maximum Plasma Power Output3.0 kW
- Power Output±1.5% (from 20 - 100% of max. power)
- Frequency2440 - 2470 MHz
- Ripple±1% of output power
- Ambient Temperatureup to 40°C max.
- Generator to Head DistanceUp to 100 feet maximum
- Microwave ConnectionsWR284F waveguide with CPR284F flanges
- Power Requirements200/208 VAC ±10%, 3 phase, 50/60 Hz
- ComplianceCE, ETL, Semi S2-93A, F47
- CoolingWater, 1.5 gpm, 30°C maximum @ 30 psid minimum
- Power Supply Generator Dimensions7.0 x 19 x 23 in. (178 x 483 x 584 mm) (height x width x depth)
- Power Head Magnetron Head Dimensions10 x 7.62 x 14.5 in. (254 x 193.5 x 368.3mm) (height x width x depth)
- Remote ControlAnalog, RS485, DeviceNet™,