626D 0.1-1000 Torr, Unheated Absolute Baratron® Capacitance Manometers
Overview
The 626D Unheated Absolute Baratron® Capacitance Manometer is the latest of MKS analog capacitance-based, high-performance vacuum and pressure transducers. It requires ±15VDC input voltage and provides a high-level 0-10 VDC analog output signal that is linear with pressure.
- 0 to 10 VDC proportional analog output with 15-pin D-sub connector
- Direct measurement of chamber total pressure independent of gas type or composition
- Long-term output stability for state-of-the-art process repeatability
- Inconel® and Incoloy® nickel alloy construction of basic sensor operates without damage in virtually any chemical environment
- High overpressure limit ensures reliability during system mishaps
- Specified in percent of reading for best accuracy and improved process yield
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
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626D01TBE Absolute Pressure Transducer, 1 Torr, 0-10 VDC, 8 VCR-F, 15-pin D-sub | $1,390.00 |
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626D01TDE Absolute Pressure Transducer, 1 Torr, 0-10 VDC, NW16 ISO-KF, 15-pin D-sub | $1,390.00 |
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626D02TBE Absolute Pressure Transducer, 2 Torr, 0-10 VDC, 8 VCR-F, 15-pin D-sub | $1,390.00 |
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626D02TDE Absolute Pressure Transducer, 2 Torr, 0-10 VDC, NW16 ISO-KF, 15-pin D-sub | $1,390.00 |
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626D11TBE Absolute Pressure Transducer, 10 Torr, 0-10 VDC, 8 VCR-F, 15-pin D-sub | $1,390.00 |
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626D11TDE Absolute Pressure Transducer, 10 Torr, 0-10 VDC, NW16 ISO-KF, 15-pin D-sub | $1,390.00 |
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626D12TBE Absolute Pressure Transducer, 100 Torr, 0-10 VDC, 8 VCR-F, 15-pin D-sub | $1,390.00 |
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626D12TDE Absolute Pressure Transducer, 100 Torr, 0-10 VDC, NW16 ISO-KF, 15-pin D-sub | $1,390.00 |
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626D13TBE Absolute Pressure Transducer, 1000 Torr, 0-10 VDC, 8 VCR-F, 15-pin D-sub | $1,390.00 |
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626D13TDE Absolute Pressure Transducer, 1000 Torr, 0-10 VDC, NW16 ISO-KF, 15-pin D-sub | $1,390.00 |
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Configuration Options
The following options are available for 626D Baratron® Absolute Capacitance Manometers
Ordering Code Example: 626DXXXYZ
| Configuration Option | Option Code |
|---|---|
| 626D Absolute Capacitance Manometer | 626D |
Full Scale Range |
|
| 0.1 Torr | .1T |
| 0.25 Torr | RET |
| 1 Torr | 01T |
| 2 Torr | 02T |
| 10 Torr | 11T |
| 20 Torr | 21T |
| 100 Torr | 12T |
| 500 Torr | 52T |
| 1000 Torr | 13T |
Fittings |
|
| 0.5 in. (12.7 mm) OD tube | A |
| 8 female VCR | B |
| 1.33 in. OD (33.8 mm) Conflat, rotatable | C |
| NW16 ISO-KF | D |
| 8 female VCO | E |
| NW25 ISO-KF | Q |
Accuracy |
|
| 0.25% Reading (1 to 1000 Torr) - standard | E |
| 0.15% Reading (10 to 1000 Torr) - optional | D |
| 0.50% of Reading (< 1 Torr) - standard | F |
Specifications
-
TypeVacuum/pressure Transducer
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Measurement TypeAbsolute
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Full Scale Pressure Ranges0.1, 0.25, 1, 2, 10, 20, 100, 500, or 1000 Torr and metric equivalents
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Sensor TemperatureAmbient
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Analog Output0-10 VDC into > 10 kΩ load
-
Electrical Connector15-pin D-subminiature
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Zero Temperature Coefficient0.005% FS/°C for 10 to 1000 Torr ranges
0.010% FS/°C for 2 Torr range
0.015% FS/°C for 1 Torr range
0.020% FS/°C for ranges < 1 Torr -
Span Temperature Coefficient0.04% of Reading/°C
-
Operating Temperature Range0-50°C
-
Resolution0.001% of Full Scale
-
Volume6.3 cm³
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Overpressure Limit45 psia (310 kPa)
-
Exposed MaterialsInconel® and Incoloy® nickel alloys
-
Power Requirements±15 VDC (±5%) @ 35 mA
-
ComplianceCE compliant to EMC Directive 2004/108/EC
Features
Resources
Literature
- 622D, 626D Unheated Absolute Baratron® Capacitance Manometer (2.1 MB, PDF)
- Analog 600 Series Absolute Baratron® Capacitance Manometer Selection Guide (2.9 MB, PDF)
Manuals
- MKS 622D, 626D & 623H Transducers Manual (713.3 kB, PDF)
- 626, 627, 628, E27 & E28 Capacitance Manometer Pin-outs (22.4 kB, PDF)
Ultra-High Velocity