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  5. 641B Integrated Gauge Pressure Controllers

641B Integrated Gauge Pressure Controllers

Overview Features Resources Contact Us

641B Integrated Gauge Pressure Controllers

Overview Features Resources Contact Us

The 641B gauge pressure controllers is a self contained, compact, closed-loop electronic pressure control system containing a Baratron® capacitance manometer, normally closed proportioning control valve, and closed-loop control electronics. Electrically similar to a standard MFC, the 641B is powered by ±15 VDC at only 200 mA, permitting use with standard power supply and display electronics. The pressure output and input control signals are linear 0-5 or 0-10 VDC. Two trip points with LED status indicators are for use as simple on/off process limits.

Resources

Application Notes

  • 640/641 Pressure Controllers Using the P and I Switches: A Normal User Adjustment(63.9 kB, PDF)
  • Configuring 640/641 Compact Pressure Controllers

Literature

  • 640B/641B Pressure Controller for Closed-Loop Electronic Pressure Control(231.6 kB, PDF)

Manuals

  • 640B/641B Pressure Controller Manual(582.5 kB, PDF)

Drawings & CADs

  • 641 Pressure Controller Model Files

Technical Notes

  • Vacuum Pressure Control for Semiconductor Fabrication

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