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Integrated Upstream & Downstream Pressure Controllers
Precise Upstream & Downstream Pressure Control for Optimal Processes with MKS Instruments
MKS Instruments understands the critical role of maintaining precise pressure in various industrial applications. Our innovative Pressure Controllers provide exceptional accuracy and stability for regulating gas flow in vacuum chambers.
These controllers integrate seamlessly with your vacuum system, featuring Baratron® pressure measurement technology for highly reliable pressure sensing. Paired with solenoid flow control valves and integrated control electronics, MKS Pressure Controllers offer a comprehensive solution for precise pressure regulation.
By integrating an MKS Pressure Controller into your system, you can ensure optimal pressure conditions, leading to more efficient and reliable processes.
PPCA High Performance Integrated Pressure Controllers
- Backside wafer cooling
- Fast response to set point with minimal overshoot
- Metal-sealed, cleanroom manufactured units meet critical high purity application needs
GPCA General Purpose Pressure Controllers
- Percent of set point accuracy enables precise process control
- Temperature compensated pressure sensor maintains tight accuracy
- DeviceNet™, EtherCAT®, or RS485 communications
PPCMA Downstream Pressure Controller with Mass Flow Meter
- Fast response to set point with minimal overshoot
- DeviceNet™ or EtherCAT® communications
- Integral Baratron® capacitance manometer technology
GPCMA Downstream Pressure Controller with Mass Flow Meter
- Percent of set point accuracy enables precise process control
- Temperature compensated pressure sensor maintains tight accuracy
- DeviceNet™, EtherCAT®, or RS485 communications
PDPCA Dual-zone Pressure Controllers with Mass Flow Meter
- Available with EtherCAT® or DeviceNet™ communications
- Less plumbing and cabling required
- Pressure measurement accuracy of ±0.5% of set point
640B Integrated Absolute Pressure Controllers
- Integrated Baratron® capacitance manometer technology
- Full Scale ranges as low as 10 Torr for low pressure processes
- Can be used with upstream or downstream controller applications
641B Integrated Gauge Pressure Controllers
- Integrated Baratron® manometer for accuracy, reliability, and wide range
- Full Scale ranges as low as 10 Torr for low pressure processes
- Can be used with upstream or downstream controller applications
649B Downstream Pressure Controllers with Mass Flow Meter
- Integral Baratron® capacitance manometer technology
- Patented mass flow sensor for exceptional long-term accuracy and zero stability
- Metal-sealed, cleanroom manufactured for critical high purity applications
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