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Vacuum Gauge Controllers
MKS offers a range of controllers that control ion gauges, heat-loss sensors, and thermocouples. Product features can be configured to meet your specific process needs. A variety of communication protocols, including RS-232, RS-485, and DeviceNet™, are available to speed and ease integration into your control scheme. In addition, many of the controllers provide local displays and a choice of set points that further simplify control system integration.
475 Convectron® Vacuum Gauge Controller
- Vacuum pressure measurement from 1x10-4 Torr to Atmosphere
- High-performance compact controller for bench-top or panel mount applications
- I/O options include analog outputs, setpoint relays, and serial communications
358 Micro-Ion® Vacuum Gauge Controller
- Compact, reliable, rack-mount controller for optimum Micro-Ion® Gauge performance
- Pressure measurement from 3x10-10 Torr to 5x10-2 Torr
- Dual Convectron® Gauge option extends the measurement range to Atmosphere
370 Stabil-Ion® Vacuum Gauge Controllers
- Noise-immune, all-metal, rack-mount controller for Stabil-Ion & Convectron gauges
- Bright, easy-to-read, flicker-free, 3-line, green LED display
- Digital display in Torr, Millibar, or Pascal
307 Bayard-Alpert Vacuum Gauge Controller
- Operates MKS Granville-Phillips® 274 Bayard-Alpert Ionization Vacuum Gauges
- Sequential operation of a second ionization gauge
- Up to six process control set points are available
PDR900 Vacuum Gauge Controller
- Easy to read 5 digit LED LED and LCD menu displays
- Three high power setpoint relays for process control
- Auto setup features plug and play functionality
937B Digital Combination Vacuum Gauge Controller
- Simultaneous readout & control of up to 6 sensors and gauges
- Wide measurement range from 10-11 to 20,000 Torr
- Operate hot/cold cathodes, manometers, and Piezo/Pirani sensors concurrently
946 Vacuum System Controller
- Simultaneous control and display six vacuum gauges and/or mass flow controllers
- Pressure readings from 10,000 Torr down to 10-11 Torr
- Closed-loop pressure control option for use with MKS valves
Pressure Input Modules
- Supports 15-pin analog Baratron, Convectron, Pirani & Piezo transducers
- Direct 1:1 pin mapping of pressure devices
- Supports integration of 4 MKS pressure measurement devices
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