Cirrus™ 3 Powerful and Versatile Atmospheric Gas Analyzer
Overview
Building on proven Cirrus Quadrupole Mass Spectrometry technology, the Cirrus 3 combines state-of-the-art performance in compact benchtop and rack-mounted formats. With a heated capillary inlet and fast scan speed (250 points per second), gas compositions can be tracked over wide dynamic range (ppb to percentage levels) more reliably.
- Monitors multiple gas species from trace levels (ppb) to high abundance
- Fast response - 250 data points per second & capillary inlet heated up to 300°C
- Precise and stable user-defined temperature control with enhanced oven and capillary designs
- Detect gases up to 300 amu. High resolution options (1-100HP)
- Recipe-driven Process Eye™ Professional supports gas monitoring and quantitation applications
Products
Specifications
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Mass Range1-100 amu; 100HP, 1-200 amu and 1-300 amu options
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Minimum Detectable ConcentrationGas dependent,
<100 ppb for non-interfering species -
Electron Energy & Emission CurrentOperator variable
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Operating Temperature5° to 35°C
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Maximum Operating Conditions20% to 80% RH (non-condensing)
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Bake Out Temperature180°C
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Inlet2.0 m long with 0.25 inch Swagelok® end connection, heated to 150°C
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Gas Consumption20 ml/min
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Sample Pressure1 bar nominal
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Pumping SystemHigh compression turbo-molecular pump with internal 4-stage diaphragm backing pump standard
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Vacuum Hardware60 l/s turbo molecular pump with high conductance analyzer housing, inlet system, automated vacuum controller (RVC) completely interlocked and integrated.
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Automated Inlet Pressure Controller640 (Baratron® capacitance manometer based) automated inlet pressure controller is available as an option
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PC RequirementsMicrosoft 32 bit or 64 bit Windows® 7 or 10
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Interfaces1 x RJ45 Ethernet LAN port required
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I/O Capability4 analog inputs (-11 to +11 volt, 22 bit)
2 analog outputs (0-10 volt, 12 bit)
16 TTL digital I/O -
Power Requirements100 - 240 VAC, 50 - 60 Hz
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ComplianceCE
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DimensionsBenchtop System: 593 mm L x 291 mm W x 470 mm H
Rack-mount System: 577 mm L x 482 mm W x 266 mm (6U) H -
Weight35 kg
Features
Resources
Drawings & CADs
- Cirrus™ 3 Dimensional Drawing (778.4 kB, PDF)
Literature
- Cirrus™ 3 Atmospheric Pressure Gas Analysis System (231.2 kB, PDF)
- MKS Mass Spectrometry Solutions Overview (988 kB, PDF)
Ultra-High Velocity