The C-Series CMA50A Mass Flow Meter (MFM) is a compact, fast response, model using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. The device is available in Full Scale flow rates from 14000 sccm to 50000 sccm, N2 with flow measurement from as low as 0.1% of Full Scale up to 100% of Full Scale. Communication interfaces are either analog (0 to 5 VDC) or digital (RS485, PROFINET® or Modbus TCP/IP). The required power supply voltage is 24 VDC nominal.
Features
C-Series Communication Options
| Digital I/O | RS485 | PROFINET® | Modbus |
|---|---|---|---|
| Input Power Required | 24 VDC @ (±10%), <4 watts | +24 VDC (<5 watts) | +24 VDC (<5 watts) |
| Connector | 9 pin Type D male (power and comm.) | 2 x RJ-45 (comm.) male, M8 male, 5 pin (power) | 1 x RJ-45 (comm.) male,DC power plug |
| Data Rate Switch/Selection | No switch Set data rate via RS485 |
MFC: No switch MFM: N/A |
N/A |
| Comm. Rate(s) | 9.6 Kbps 19.2 Kbps 38.4 Kbps |
MFC: 100 Mbps MFM: N/A |
N/A |
| MAC ID Switches/Addresses | Set address over RS485 Station Addresses 0,0 to 9,9 | N/A | N/A |
| Network Size | Up to 32 nodes | N/A | N/A |
| Visual Indicators | LED Power LED Run (green) |
LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red) |
LED Module LED Network |
| Compliance | CE | CE | CE |
CMA50A Selection Guide
C-Series mass flow controllers and meters are selected based on the gas and range desired. Use this table to determine the best model for your application:
| CMA50A | |||
| Gas SEMI# | Gas Symbol | Minimum Full Scale | Maximum Full Scale |
| 1 | He | 16001 | 50000 |
| 4 | Ar | 17001 | 49000 |
| 8 | Air | 14001 | 50000 |
| 13 | N2 | 14001 | 50000 |
| 15 | O2 | 13001 | 50000 |
| 110 | SF6 | 4501 | 8100 |
Resources
Literature
Drawings & CADs
C-Series Mass Flow Controller/Meter 3D Model Files C-Series Mass Flow Meter Dimensional Drawings(956 kB, PDF)
Manuals
C-Series Mass Flow Controller/Meter Manual(2 MB, PDF)