CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Meter
CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Meter
The C-Series CMA10B Mass Flow Meter (MFM) is a compact, fast response, model using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. The device is available in Full Scale flow rates from 15 sccm to 14000 sccm, N2 with flow measurement from as low as 0.1% of Full Scale up to 100% of Full Scale. Communication interfaces are either analog (0 to 5 VDC) or digital (RS485, PROFINET® or Modbus TCP/IP). The required power supply voltage is 24 VDC nominal.
- Ultrafast response time of <100 msec
- Measurement range from 0.1-100% of Full Scale
- Embedded web browser for setup and diagnostics See All Features
Configuration Options
The following options are available for C-Series Mass Flow Meters
Ordering Code Example: CMA10B013102RCV3010
|
Configuration Option |
Option Code |
|---|---|
Model |
|
| CMA10B | CMA10B |
Gas (Per Semi Standard E52-0703) |
|
| He | 001 |
| Ar | 004 |
| Air | 008 |
| N2 | 013 |
| O2 | 015 |
| SF6 | 110 |
| For other gases, contact MKS Instruments Flow range is based on gas - see the Selection Table below. |
|
Flow Range Full Scale |
|
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
Fittings (compatible with) |
|
| 4 VCR Male | R |
| 0.25 in. Compression | S |
| Downmount O-ring Seal | C |
| For other options, contact MKS Instruments | |
Connector |
|
| Dual I/O (Analog 9-Pin/RS485 ASCII) RS-485 Primary | R |
| Dual I/O (Analog 9-Pin/RS485 ASCII) Analog Primary | C |
| Modbus TCP | M |
| PROFINET | 9 |
Seal Materials |
|
| Viton | V |
Valve/Device Type |
|
| No Valve/Mass Flow Meter (Same length as MFC) | 3 |
| No Valve/Mass Flow Meter (Reduced Length) Reduced length not available for W-Seal or Downmount O-ring Seal fittings |
4 |
Reserved (future use) |
|
| Standard Build | 0 |
Firmware |
|
| RS485/Analog Dual I/O | 10 |
| Modbus TCP | 10 |
| PROFINET | 10 |
Specifications
- TypeMass Flow Meter
- Full Scale Flow Range15-14,000 sccm (N2)
- Maximum Inlet Pressure80 psig
- Proof Pressure232 psi/16 bar
- Burst Pressure1000 psi/70 bar
- Measurement Range0.1-100% of Full Scale
- Typical Accuracy±0.8% of Reading
- Repeatability±0.2% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient≤0.005% of Full Scale/°C
- Span Temperature Coefficient≤0.06% of Reading/°C
- Pressure Coefficient<0.025% of Reading/psi
- Warm-up Time≤1 min
- Operating Temperature10-50°C (32-122°F)
- Storage Humidity0-95% relative humidity, non-condensing
- Storage Temperature0-60°C (32-140°F)
- Fitting TypeCompatible with:
Swagelok® 4 VCR® male
surface mount (o-ring)
0.25 in. Swagelok compression - External Leak Integrity<1 x 10-09
- Wetted MaterialsStandard: Aluminum, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
- Set Point Command Signal0-5 VDC (0-10 VDC, optional)
- Power Requirements24 VDC @ (±10%), <2 watts
- Flow Input Output Signal0-5 VDC (0-10 VDC, optional)
- Analog I/O Connector9-pin Type D
- Weight0.45 lbs (204 grams) (VCR)
- ComplianceCE (Electrical Analog I/O)
Features
CMA10B Selection Guide
C-Series mass flow controllers and meters are selected based on the gas and range desired. Use this table to determine the best model for your application:
| CMA10B | |||
| Gas SEMI# | Gas Symbol | Minimum Full Scale | Maximum Full Scale |
| 1 | He | 23 | 16000 |
| 4 | Ar | 40 | 14000 |
| 8 | Air | 15 | 14000 |
| 13 | N2 | 15 | 14000 |
| 15 | O2 | 14 | 13000 |
| 110 | SF6 | 7 | 4500 |
C-Series Communication Options
| Digital I/O | RS485 | PROFINET® | Modbus |
|---|---|---|---|
| Input Power Required | 24 VDC @ (±10%), <4 watts | +24 VDC (<5 watts) | +24 VDC (<5 watts) |
| Connector | 9 pin Type D male (power and comm.) | 2 x RJ-45 (comm.) male, M8 male, 5 pin (power) | 1 x RJ-45 (comm.) male,DC power plug |
| Data Rate Switch/Selection | No switch Set data rate via RS485 |
MFC: No switch MFM: N/A |
N/A |
| Comm. Rate(s) | 9.6 Kbps 19.2 Kbps 38.4 Kbps |
MFC: 100 Mbps MFM: N/A |
N/A |
| MAC ID Switches/Addresses | Set address over RS485 Station Addresses 0,0 to 9,9 | N/A | N/A |
| Network Size | Up to 32 nodes | N/A | N/A |
| Visual Indicators | LED Power LED Run (green) |
LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red) |
LED Module LED Network |
| Compliance | CE | CE | CE |
Resources
Literature
Drawings & CADs
C-Series Mass Flow Meter Dimensional Drawings(956 kB, PDF)
Manuals
C-Series Mass Flow Controller/Meter Manual(2 MB, PDF) C-Series MFC/MFM Modbus Register Map & Specification(135.9 kB, PDF)
Application Notes
Device Description Files
C-Series MFC/MFM PROFINET GSDML File (.XML)(30.5 kB, XML)
