The DA02B EtherCAT® Baratron® capacitance manometer continues that progression of high performance into networked systems, using industry-standard EtherCAT digital communications to connect to complex process tools. Based on the proven 627C and 628C Ethernet-equipped Baratron products, the EtherCAT Baratron manometer meets the current SEMI® EtherCAT Common Device Profile and is designed for use in advanced processing systems.
The following options are available for DA02B Baratron® Heated Capacitance Manometers
Ordering Code Example: DA02B11TCES24C00AA
Configuration Option | Option Code |
---|---|
DA02B Heated Capacitance Manometers | DA02B |
Full Scale Range |
|
0.1 | .1 |
0.25 | RE |
1 | 01 |
2 | 02 |
10 | 11 |
20 | 21 |
100 | 12 |
200 | 22 |
500 | 52 |
1000 | 13 |
Units of Measurement |
|
Torr | T |
mbar | M |
kPa | K |
Fittings |
|
0.5 in. OD tube | BA |
8 VCR female | CE |
8 VCR male | CF |
8 VCR female, short tube | CR |
NW16 ISO-KF | GA |
NW25 ISO-KF | GC |
1.33 in. OD CF | HA |
Sensor Type |
|
Standard sensor, standard inlet tube length | S |
Standard sensor, reduced inlet tube length (use with fitting code CR) | T |
Deposition/etch/fluorine friendly sensor (range to 20 Torr) | L |
Short tube deposition/etch/fluorine friendly sensor (range to 2 Torr, use with fitting code CR) | M |
Analog Output |
|
0-10 VDC | 2 |
Sensor Temperature |
|
unheated | 0 |
100°C | 1 |
80°C | 8 |
45°C | 4 |
Electrical Connector |
|
(2) RJ45 EtherCAT jacks with 15-pin D-subminiature connector | C |
Calibration Orientation (select V or H for range =1 Torr) |
|
Standard (ranges > 1 Torr) | 0 |
Vertical (standard for ranges ≤ 1 Torr) | V |
Horizontal (available for ranges ≤ 1 Torr only) | H |
Accuracy |
|
Standard accuracy | 0 |
Trip Points |
|
None | None |
Trip A above 50%, Trip B above 50% of Full Scale Range | AA |
Trip A above 50%, Trip B below 50% of Full Scale Range | AB |
Trip A below 50%, Trip B below 50% of Full Scale Range | BB |
Trip A below 50%, Trip B above 50% of Full Scale Range | BA |
Custom Part numbers can be requested for copy exact applications. Standard part numbers will ship with the latest firmware at the date of manufacture. A custom part number should be requested for locked firmware/EtherCAT ESI file. |