Not recommended for new designs. For new applications see DA05A for Full Scale pressures <1 Torr/mbar and DA07A for Full Scale pressures 1 Torr/mbar and greater.
The DA02B EtherCAT® Baratron® capacitance manometer continues that progression of high performance into networked systems, using industry-standard EtherCAT digital communications to connect to complex process tools. Based on the proven 627C and 628C Ethernet-equipped Baratron products, the EtherCAT Baratron manometer meets the current SEMI® EtherCAT Common Device Profile and is designed for use in advanced processing systems.
Unheated or controlled to 45°C, 80°C or 100°C
EtherCAT® Communications and 0-10 VDC output proportional to pressure
Full Scale measurement ranges from 0.1 to 1000 Torr (13.3 Pa to 133.3 kPa)
Standard or etch sensors available
Fully-welded Inconel and Incoloy® sensor for extremely high corrosion resistance
The following options are available for DA02B Baratron® Heated Capacitance Manometers
Ordering Code Example: DA02B11TCES24C00AA
Configuration Option
Option Code
DA02B Heated Capacitance Manometers
DA02B
Full Scale Range
0.1
.1
0.25
RE
1
01
2
02
10
11
20
21
100
12
200
22
500
52
1000
13
Units of Measurement
Torr
T
mbar
M
kPa
K
Fittings
0.5 in. OD tube
BA
8 VCR female
CE
8 VCR male
CF
8 VCR female, short tube
CR
NW16 ISO-KF
GA
NW25 ISO-KF
GC
1.33 in. OD CF
HA
Sensor Type
Standard sensor, standard inlet tube length
S
Standard sensor, reduced inlet tube length (use with fitting code CR)
T
Deposition/etch/fluorine friendly sensor (range to 20 Torr)
L
Short tube deposition/etch/fluorine friendly sensor (range to 2 Torr, use with fitting code CR)
M
Analog Output
0-10 VDC
2
Sensor Temperature
unheated
0
100°C
1
80°C
8
45°C
4
Electrical Connector
(2) RJ45 EtherCAT jacks with 15-pin D-subminiature connector
C
Calibration Orientation (select V or H for range =1 Torr)
Standard (ranges > 1 Torr)
0
Vertical (standard for ranges ≤ 1 Torr)
V
Horizontal (available for ranges ≤ 1 Torr only)
H
Accuracy
Standard accuracy
0
Trip Points
None
None
Trip A above 50%, Trip B above 50% of Full Scale Range
AA
Trip A above 50%, Trip B below 50% of Full Scale Range
AB
Trip A below 50%, Trip B below 50% of Full Scale Range
BB
Trip A below 50%, Trip B above 50% of Full Scale Range
BA
Custom Part numbers can be requested for copy exact applications.
Standard part numbers will ship with the latest firmware at the date of manufacture.
A custom part number should be requested for locked firmware/EtherCAT ESI file.
45°C Models: 0.10% of Reading for ranges ≥1 Torr, 0.15% Reading for ranges <1 Torr 80° and 100°C Models: 0.25% of Reading for ranges ≥1 Torr, 0.50% of Reading for ranges <1 Torr
Resolution
0.001% Full Scale
Communication Protocol
EtherCAT®
Analog Output
0-10 VDC into >10Ω load
Analog Connector
15-pin D-subminiature male
Digital Connector
Two (2) RJ45 female receptacles for incoming and network signals
Zero Temperature Coefficient
45°C Models:0.002% Full Scale/°C for ranges ≥1 Torr; 0.005% Full Scale/°C for ranges <1 Torr 80° and 100°C Models: 0.002% Full Scale/°C for ranges ≥1 Torr; 0.010% Full Scale/°C for ranges <1 Torr
Span Temperature Coefficient
0.02% Reading/°C
Ambient Operating Temperature
45°C Models: 15-40°C 80° and 100°C Models: 15-50°C
Volume
6.3 cc
Warm-up Time
2 hours for ranges ≥1 Torr 4 hours for ranges <1 Torr
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