The DA07A builds off the same Inconel® sensor as the industry and process proven MKS 600 Series and DA02 Baratron Capacitance Manometer, resulting in long life, low maintenance, exceptional corrosion resistance, and high maximum overpressure limit. The manometer is equipped with a 1 ms EtherCAT® communication refresh rate, 12 ms nominal pressure response time, extensive use of automotive grade electronics, and an extended maximum ambient operating temperature of 60°C. The advanced electronics in the DA07A also provides an improved signal to noise ratio and faster response time than the industry-standard DA02. Further, the resolution and response of both the analog and digital pressure signal can be user optimized for specific applications through adjustment of the programmable filter setting.

Available with the standard MKS sensor or optional proprietary etch/fluorine/deposition friendly sensor for enhanced stability and reduced process induced zero drift in critical etch or deposition applications.

See the DA05A for Full Scale pressures less than 1 Torr/mbar.