DA03B Heated (150 - 200°C) 1 - 1000 Torr, Absolute Baratron® Capacitance Manometer with EtherCAT®
Overview
The DA03B Baratron® Capacitance Manometer improves process capability by reducing output drift. Operating at sensor temperatures up to 200°C, the DA03B’s high temperature operation minimizes the deposition of process byproducts within the sensor. High temperature operation combined with a large sensor reduces sensor process contamination effects resulting in increased sensitivity and zero process related drift. The DA03B leverages the same proven digital architecture of the industry-standard DA02A, making it well suited for advanced applications such as Chemical Vapor Deposition (CVD), Atomic Layer Deposition (ALD), semiconductor processes, and lyophilization.
- Long-term performance in ALD, CVD, Lyophilization, and other advanced manufacturing processes
- Minimizes the deposition of byproducts
- Provides fail-safe over-temperature protection
- All-Inconel larger sensor for superior sensitivity, corrosion resistance, and long-term stability
Products
Configuration Options
The following options are available for DA03B Baratron® Heated Capacitance Manometers
Ordering Code Example: DA03B11TCES36BAA0000
| Configuration Option | Option Code |
|---|---|
Model |
|
| DA03B Absolute Manometer | DA03B |
Ranges (Torr) |
|
| 1 | 01 |
| 2 | 02 |
| 3 | 03 |
| 5 | 05 |
| 10 | 11 |
| 20 | 21 |
| 100 | 12 |
| 1000 | 13 |
Units of Measurement (as shown on calibration sheet) |
|
| Torr | T |
| mbar | M |
| kPa | K |
Fittings |
|
| 0.5 in. OD tube | BA |
| 8 VCR female | CE |
| 8 VCR male | CF |
| NW16-KF | GA |
| NW25-KF | GC |
| Mini-CF | HA |
| 1.5 in. TriClover1 | KA |
| 2.0 in. TriClover1 | KB |
Sensor Type |
|
| Standard | S |
| Deposition/Fluorine Friendly (1, 2, 10, 100, 1000 Torr) | L |
Input/Output Voltages |
|
| ±15 VDC | 2 |
| +24 VDC | 3 |
Sensor Temperature |
|
| 200°C | 2 |
| 160°C | 6 |
| 150°C | 5 |
Electrical Connector2 |
|
| 15-pin D with Screw Locks | B |
| 15-pin D with Slide Lock Posts | P |
Integral Relays3 |
|
| No Relays | 00 |
| Trip Point A Above Set Point, Trip Point B Above Set Point | AA |
| Trip Point A Above Set Point, Trip Point B Below Set Point | AB |
| Trip Point A Below Set Point, Trip Point B Below Set Point | BB |
| Trip Point A Below Set Point, Trip Point B Above Set Point | BA |
Reserved |
|
| Reserved For Future Use | 0 |
Calibration Orientation |
|
| Ranges 1 Torr and above (not required) | 0 |
Accuracy |
|
| Standard | 0 |
Other Options |
|
| None | 0 |
Notes:
1 Products with TriClover fittings have Type 316L stainless steel fittings.
2 For CE compliance, the mating electrical connector must be properly grounded.
3 Units with trip points have default set points of 50% of Full Scale, a default hysteresis of 0, and actuation direction based on the part number code. The settings are user adjustable through EtherCAT.
* Custom part numbers can be requested for copy exact applications.
** Standard part numbers will ship with the latest firmware at the date of manufacture. A custom part number should be requested for locked firmware/EtherCAT ESI file.
Specifications
-
TypePressure Transducer
-
Sensor TypeCapacitance Manometer
-
Measurement TypeAbsolute
-
Full Scale Range1, 2, 3, 5, 10, 20, 100, 1000 Torr
-
Accuracy±0.25% of Reading
-
Fitting TypeStandard:
0.5 in. (12 mm) OD tube
Optional:
Swagelok® 8 VCR® female, 8 VCR male, NW16-KF, NW25-KF, Mini-CF, 1.5 in. TriClover, 2 in. TriClover -
Analog OutputAnalog 0-10 VDC into >10kW load, EtherCAT
-
Trip RelaysStandard:
Two (2) internal solid state relays provided for heater "at temperature" status and heater failure. Relay capacity of 1 amp at 30 VDC.
Optional:
Two (2) internally mounted process pressure trip relays, solid state, independently adjustable by customer at atmospheric pressure from 0.5% to 100% of Full Scale range. Relay capacity of 1 amp @ 30 VDC. -
Resolution0.001% of Full Scale
-
Zero Temperature Coefficient150°C/160°C:
±0.004% Full Scale/°C for >1 Torr
±0.008% Full Scale/°C for 1 Torr range
200°C:
±0.008% Full Scale/°C for >1 Torr
±0.016% Full Scale/°C for 1 Torr range
-
Span Temperature Coefficient±0.02% Reading/°C
-
Response TimeAnalog/Digital:
35 ms (nominal) influenced by pressure range, step size, and digital pressure filter settings
EtherCAT:
Refresh Rate = 3.3 ms -
Warm-up Time2.5 hours typical
-
Internal Volume6.3 cm3 typical. Contact MKS for volumes with specific flanges.
-
Operating Temperature15 - 50°C
-
Overpressure Limit45 psia
-
Materials Exposed to Process GasesInconel® and Incoloy® nickel alloys (some fitting options are 300 Series Stainless)
-
Power Requirements±15 VDC @ 1.6A or +24 VDC @ 1.3A at start up (factory set)
-
Ambient Airflow Requirements150/160°C Models:
50 ft/min for ambient temperatures of 40 - 50°C
200°C Models:
150 ft/min for ambient temperatures of 40 - 50°C -
ComplianceCE, UL1577 (Trip Relays only)
Features
Resources
Literature
- DA03B Heated Baratron® Manometer with EtherCAT® (2.2 MB, PDF)
Manuals
- DA03B Manometer Manual (1.7 MB, PDF)
Drawings & CADs
- DA03B Capacitance Manometer Dimensional Drawing (654.4 kB, PDF)
Other
- EU 27 Declaration of Conformity for MKS Direct Pressure Products (120.3 kB, PDF)
- UK Declaration of Conformity for MKS Direct Pressure Products (115 kB, PDF)
- EU 27 Declaration of Conformity for MKS Direct Pressure Products (120.3 kB, PDF)
- UK Declaration of Conformity for MKS Direct Pressure Products (115 kB, PDF)
Ultra-High Velocity