The DA03B Baratron® Capacitance Manometer improves process capability by reducing output drift. Operating at sensor temperatures up to 200°C, the DA03B’s high temperature operation minimizes the deposition of process byproducts within the sensor. High temperature operation combined with a large sensor reduces sensor process contamination effects resulting in increased sensitivity and zero process related drift. The DA03B leverages the same proven digital architecture of the industry-standard DA02A, making it well suited for advanced applications such as Chemical Vapor Deposition (CVD), Atomic Layer Deposition (ALD), semiconductor processes, and lyophilization.
Features
Baratron® Capacitance Manometer Technology
Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.
DA03B Details
The DA03B is completely self-contained and is available in either +24 VDC or ±15 VDC input power configurations. Its Inconel® sensor is resistant to corrosion, and its overpressure rating of 45 psia ensures good repeatability and stability regardless of the system operating conditions. Optional sensors and deposition traps are available for enhanced zero drift capabilities. The high-performance digital electronics of the DA03B also includes fail-safe over-temperature protection and LED status lights to indicate the operating state. Solid state relay outputs provide indication of sensor at temperature and heater failure. Additional options include an internally-mounted set of two (2) UL recognized solid state trip relays provided for pressure trip points for control of external equipment or components. The pressure trip relays may be set by the user over the EtherCAT bus at atmospheric pressure, eliminating the need for vacuum pumps during set point adjustment.
DA03B Key Features
- Sensor operating temperature of 150°C to 200°C (factory set)
- High 45 psia overpressure rating for improved stability and repeatability
- Optional internally-mounted, user programmable solid state process relays for external control
- Insensitive to gas composition
- EtherCAT interface and analog outputs
Internally Heated to 150, 160, or 200°C
These capacitance manometers are temperature controlled to 150, 160, or 200 degrees C for improved accuracy. Unheated sensors are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer permitting use in the most demanding advanced applications, such as Chemical Vapor Deposition (CVD), Atomic Layer Deposition (ALD), semiconductor processes, and lyophilization.
Resources
Literature
DA03B Heated Baratron® Manometer with EtherCAT®(2.2 MB, PDF)
Manuals
DA03B Manometer Manual(1.7 MB, PDF)
Drawings & CADs
DA03B Capacitance Manometer Dimensional Drawing(654.4 kB, PDF)